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Patent Searching and Data


Title:
RESONATOR AND RESONATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/211926
Kind Code:
A1
Abstract:
A resonator (10) is provided with: a vibration part (120) having a substrate (F2) that has a main surface, a lower electrode (E1) that is formed on the main surface of the substrate (F2), a piezoelectric film (F3) that is formed on the lower electrode (E1), and an upper electrode (E2) that is formed on the piezoelectric film (F3); and a holding part (140) that is provided so as to surround at least a part of the vibration part (120). Opening grooves having different widths in a first direction in a planar view of the main surface of the substrate (F2) are provided around the vibration part (120). In the planar view of the main surface of the substrate (F2), the upper electrode (E2) is provided with a gap along the first direction from the outer edge of the substrate (F2), and is formed such that the length of the gap in a region where the width of the opening groove is large is larger than that of the gap in a region where the width of the opening groove is small.

Inventors:
KAWAI, Ryota (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
NISHIMURA, Toshio (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
Application Number:
JP2018/047346
Publication Date:
November 07, 2019
Filing Date:
December 21, 2018
Export Citation:
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Assignee:
MURATA MANUFACTURING CO., LTD. (10-1, Higashikotari 1-chome Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
International Classes:
H03H9/24
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (TMI ASSOCIATES, 23rd Floor Roppongi Hills Mori Tower, 6-10-1, Roppongi, Minato-k, Tokyo 23, 〒1066123, JP)
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