Title:
RESONATOR WITH GAP OF STEP STRUCTURE BEING PARTIALLY FILLED, AND FILTER AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/244254
Kind Code:
A1
Abstract:
A bulk acoustic wave resonator, comprising: a substrate (201); an acoustic mirror (203); a bottom electrode (205) arranged above the substrate (201); a top electrode (209) arranged opposite the bottom electrode (205) and provided with an electrode connection portion; and a piezoelectric layer (207) arranged above the bottom electrode (205) and between the bottom electrode (205) and the top electrode (209), wherein an edge of the top electrode (209) is provided with a suspended wing structure and/or a bridge portion structure (213), and a gap (211) is provided below the suspended wing structure and/or the bridge portion structure (213). The resonator further comprises a filling layer (217), wherein the filling layer (217) fills only a portion of the gap (211). The present invention further relates to a filter provided with the bulk acoustic wave resonator, and an electronic device provided with the filter.
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Inventors:
YANG QINGRUI (CN)
PANG WEI (CN)
ZHANG MENGLUN (CN)
PANG WEI (CN)
ZHANG MENGLUN (CN)
Application Number:
PCT/CN2020/076213
Publication Date:
December 10, 2020
Filing Date:
February 21, 2020
Export Citation:
Assignee:
UNIV TIANJIN (CN)
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/02; H03H9/56
Foreign References:
| US20140176261A1 | 2014-06-26 | |||
| US20140176261A1 | 2014-06-26 | |||
| US20140125202A1 | 2014-05-08 | |||
| CN110166018A | 2019-08-23 | |||
| CN105680813A | 2016-06-15 | |||
| US20110084779A1 | 2011-04-14 | |||
| US20180152168A1 | 2018-05-31 |
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
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