Title:
RESONATOR
Document Type and Number:
WIPO Patent Application WO/2022/007234
Kind Code:
A1
Abstract:
Provided is a resonator (100), comprising a substrate (1), a composite film (2), and a longitudinal acoustic wave reflector (3); the composite film (2) comprises a first electrode (21), a piezoelectric functional film (22), a second electrode (23), and a frequency modulator (24) arranged in sequence in a first direction, the first electrode (21) being arranged above the substrate (1) and the longitudinal acoustic wave reflector (3); the frequency modulator (24) comprises a frequency modulation main body part (241) and a convex ring (242), and the acoustic impedance of the convex ring (242) is different from the acoustic impedance of the frequency modulation main body part (241); the region enclosed by the orthographic projection of the inner surface of the convex ring (242) onto the second electrode (23) in the first direction is a resonant region (10), and the region outside the resonant region (10) of the resonator (100) is a non-resonant region (20); both the first and second electrodes (21, 23) and the piezoelectric functional film (22) completely cover the resonant region (10); the piezoelectric functional film (22) comprises a longitudinal piezoelectric film (221) and a longitudinal non-piezoelectric film (222); the acoustic impedance of the resonator (100) in the resonant region (10) is different from that in the non-resonant region (20), and the acoustic impedances of the first electrode (21), the piezoelectric functional film (22), the second electrode (23), and the frequency modulation main body (241) located in the resonant region (10) are substantially constant. The resonator (100) has small energy loss and an increased Q value.
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Inventors:
DOU SHAOXU (CN)
LOO LI ENG (SG)
YANG SHUAI (CN)
WU YILEI (CN)
HAN QI (CN)
WU KE (CN)
WANG CHAO (CN)
LOO LI ENG (SG)
YANG SHUAI (CN)
WU YILEI (CN)
HAN QI (CN)
WU KE (CN)
WANG CHAO (CN)
Application Number:
PCT/CN2020/122195
Publication Date:
January 13, 2022
Filing Date:
October 20, 2020
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
AAC TECH NANJING CO LTD (CN)
AAC TECH NANJING CO LTD (CN)
International Classes:
H03H9/17
Foreign References:
CN101924529A | 2010-12-22 | |||
CN107592090A | 2018-01-16 | |||
CN108233889A | 2018-06-29 | |||
US20140354115A1 | 2014-12-04 |
Attorney, Agent or Firm:
SHENZHEN JUNXINCHENG INTELLECTUAL PROPERTY FIRM (GENERAL PARTNERSHIP) (CN)
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