Title:
RETENTION MECHANISM FOR HEATING COIL OF HIGH TEMPERATURE DIFFUSION FURNACE
Document Type and Number:
WIPO Patent Application WO2004105435
Kind Code:
A3
Abstract:
A heating assembly for use in an electric furnace includes a helical heating element encircled by thermal insulation, and rows of spacers for keeping turns of the heating element spaced apart by predetermined distances. Each spacer includes circumferential side portions facing generally in a circumferential direction of the heating element and converging toward a center region of the spacer to form a radial undercut against which the insulation abuts. The spacers of each row have through holes extending parallel to a longitudinal axis of the heating element. A guide rod extends through the through holes of each row of spacers.
Inventors:
PECK KEVIN B (US)
Application Number:
PCT/US2004/016276
Publication Date:
March 17, 2005
Filing Date:
May 24, 2004
Export Citation:
Assignee:
MRL IND (US)
PECK KEVIN B (US)
PECK KEVIN B (US)
International Classes:
F27B17/00; F27D11/00; H01L21/00; H05B3/66; (IPC1-7): H05B3/66; F27D7/06
Foreign References:
US4341916A | 1982-07-27 | |||
US4418415A | 1983-11-29 | |||
US5095192A | 1992-03-10 |
Other References:
See also references of EP 1632110A4
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