Title:
REVERSE X-RAY PHOTOELECTRON HOLOGRAPHY DEVICE AND ITS MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2008/044315
Kind Code:
A1
Abstract:
[PROBLEMS] To provide a reverse X-ray photoelectron holography device, in which
energy control and convergence are facilitated and a hologram of good contrast is
obtained; and to provide its measuring method. [MEANS FOR SOLVING PROBLEMS] A
reverse X-ray photoelectron holography measuring method where a measurement sample
is irradiated with an electron beam, incident angle and rotation angle of the
electron beam are varied by varying the posture of the measurement sample to the
electron beam, and a variation in intensity of characteristic X-ray emitted when
the measurement sample is excited is recorded as the atomic resolution hologram around
the atom of a specific element, wherein, when the intensity is detected as the
characteristic X-ray of the atom of the measurement sample, an object wave is
generated as an electron wave scattered by the reference wave and the proximity atom
in a holography where electrons incident to the measurement sample reach an atom
generating specific X-ray as an electron wave, and an interference pattern is
formed by compounding the reference wave with the object wave, thus monitoring the
intensity of an electron beam.
Inventors:
HAYASHI, Koichi (1-1 Katahira 2-chome, Aoba-k, Sendai-shi Miyagi 77, 9808577, JP)
林 好一 (〒77 宮城県仙台市青葉区片平二丁目１番１号 国立大学法人東北大学内 Miyagi, 9808577, JP)
MATSUBARA, Eiichiro (1-1 Katahira 2-chome, Aoba-k, Sendai-shi Miyagi 77, 9808577, JP)
林 好一 (〒77 宮城県仙台市青葉区片平二丁目１番１号 国立大学法人東北大学内 Miyagi, 9808577, JP)
MATSUBARA, Eiichiro (1-1 Katahira 2-chome, Aoba-k, Sendai-shi Miyagi 77, 9808577, JP)
Application Number:
JP2006/320480
Publication Date:
April 17, 2008
Filing Date:
October 13, 2006
Export Citation:
Assignee:
TOHOKU UNIVERSITY (1-1 Katahira 2-chome, Aoba-ku Sendai-shi Miyagi, 77, 9808577, JP)
国立大学法人東北大学 (〒77 宮城県仙台市青葉区片平二丁目１番１号 Miyagi, 9808577, JP)
JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE (1-1-1, Kouto Sayo-ch, Sayo-gun Hyogo 98, 6795198, JP)
財団法人高輝度光科学研究センター (〒98 兵庫県佐用郡佐用町光都１丁目１番１号 Hyogo, 6795198, JP)
HAYASHI, Koichi (1-1 Katahira 2-chome, Aoba-k, Sendai-shi Miyagi 77, 9808577, JP)
国立大学法人東北大学 (〒77 宮城県仙台市青葉区片平二丁目１番１号 Miyagi, 9808577, JP)
JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE (1-1-1, Kouto Sayo-ch, Sayo-gun Hyogo 98, 6795198, JP)
財団法人高輝度光科学研究センター (〒98 兵庫県佐用郡佐用町光都１丁目１番１号 Hyogo, 6795198, JP)
HAYASHI, Koichi (1-1 Katahira 2-chome, Aoba-k, Sendai-shi Miyagi 77, 9808577, JP)
International Classes:
G01N23/22; G01B15/04
Attorney, Agent or Firm:
SHIGENOBU, Kazuo et al. (7F Admiral Kioicho Bldg, 3-28 Kioi-ch, Chiyoda-ku Tokyo, 102-0094, JP)
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