RF POWER DISTRIBUTION DEVICE AND RF POWER DISTRIBUTION METHOD

WIPO Patent Application WO/2012/015147

A2

The present invention provides an RF power distribution device and an RF power distribution method. The device includes an impedance matching network for delivering power from an RF power source, and a power distribution unit for distributing the output power from the impedance matching network to at least one electrode generating a capacitively coupled plasma. The power distribution unit includes: a first reactance device connected in series to a first electrode; a variable capacitor having one end connected in parallel to the first reactance device and the first electrode, and having the other end grounded; and a second reactance device having one end connected to a first node where the one end of the variable capacitor and one end of the first reactance device contact each other, and having the other end connected to a second node where a second electrode and an output terminal of the impedance matching network are connected.

KIM, Jaehyun (1 Hanbit Apt, Eoeun-dong Yuseong-gu, Daejeon 305-755, 305-755, KR)
김재현 (대전광역시 유성구 어은동 한빛아파트, 305-755 Daejeon, 305-755, KR)
LEE, Sang Won (208-702, Daedeok Techno Valley Apt. Gwanpyeong-dong, Yuseong-gu, Daejeon 305-509, 305-509, KR)

KR2011/002951

February 02, 2012

April 22, 2011

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PLASMART INC. (543 Yongsan-dong, Yuseong-gu, Daejeon 305-500, 305-500, KR)
주식회사 플라즈마트 (대전광역시 유성구 용산동 543, 305-500 Daejeon, 305-500, KR)
KIM, Jaehyun (1 Hanbit Apt, Eoeun-dong Yuseong-gu, Daejeon 305-755, 305-755, KR)
김재현 (대전광역시 유성구 어은동 한빛아파트, 305-755 Daejeon, 305-755, KR)

H05H1/46; H03H7/40

LEE, Pyung Woo (#1613, Union Center B/D 837-11, Yeoksam-dong, Gangnam-gu, Seoul 135-808, 135-808, KR)

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