Title:
RIDGE WAVEGUIDE-BASED SPR BIOCHEMICAL SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/188137
Kind Code:
A1
Abstract:
The invention relates to a ridge waveguide-based SPR biochemical sensor which comprises an SPR detection chip and an optical fiber bracket (1) processed on the same SOI silicon wafer, a plurality of polymer cavities formed by polymers (9) bonded to the surface of the chip, a micro-runner system formed by the polymer cavities, and a photoelectric detector and detection circuit (8) arranged in the polymer cavities. The SRP detection chip comprises a ridge waveguide (2), a sample pond (10) and a metal film (7). An optical fiber is coupled to the ridge waveguide (2) through the optical fiber bracket (1). The ridge waveguide (2) is coupled to the photoelectric detector and detection circuit (8). The middle section of the ridge waveguide (2) is coupled to the sample pond (10), the micro-runner system is connected to the sample pond (10). The metal film (7) directly contacts with a sample in the sample pond (10). Light transmitted from the input end of the ridge waveguide (2) is reflected through the metal film (7) and is then emitted along the ridge waveguide (2). The change of light intensity is detected by means of the photoelectric detector and detection circuit (8), and the light is converted into an electric signal, so that sample detection in the sample pond (10) is realized. The sensor is easy to process, with high sensitivity and low cost.
Inventors:
DONG YING (CN)
WANG XI (CN)
WANG XIAOHAO (CN)
WANG XI (CN)
WANG XIAOHAO (CN)
Application Number:
PCT/CN2017/083293
Publication Date:
October 18, 2018
Filing Date:
May 05, 2017
Export Citation:
Assignee:
GRADUATE SCHOOL SHENZHEN TSINGHUA UNIV (CN)
International Classes:
G01N21/552
Foreign References:
| CN105823759A | 2016-08-03 | |||
| US7483140B1 | 2009-01-27 | |||
| KR20080044939A | 2008-05-22 | |||
| CN102519911A | 2012-06-27 | |||
| US7061619B2 | 2006-06-13 | |||
| KR20100081828A | 2010-07-15 |
Other References:
YUAN, D.P. ET AL.: "Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array", SENSORS, vol. 15, 16 July 2015 (2015-07-16), XP055542438, ISSN: 1424-8220
Attorney, Agent or Firm:
CHINA TRUER IP (CN)
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