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Title:
RING FOR ELECTRODE
Document Type and Number:
WIPO Patent Application WO/2018/025780
Kind Code:
A1
Abstract:
This invention is characterized in being provided with three or more arcuate silicon members (38) and a joining part for joining the silicon members (38), the joining part containing boron oxide.

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Inventors:
IKARI ATSUSHI (JP)
FUJII SATOSHI (JP)
Application Number:
PCT/JP2017/027559
Publication Date:
February 08, 2018
Filing Date:
July 28, 2017
Export Citation:
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Assignee:
THINKON NEW TECH JAPAN CORPORATION (JP)
International Classes:
H01L21/3065; H05H1/46
Foreign References:
JP2010114313A2010-05-20
JP2008251639A2008-10-16
JP2015065024A2015-04-09
JP2015159202A2015-09-03
JP2001101968A2001-04-13
JP2012146743A2012-08-02
JP2014094855A2014-05-22
JP2012040677A2012-03-01
JP2002190466A2002-07-05
Other References:
See also references of EP 3496134A4
Attorney, Agent or Firm:
YOSHIDA Tadanori (JP)
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