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Title:
RING FOR ELECTRODE
Document Type and Number:
WIPO Patent Application WO/2018/025780
Kind Code:
A1
Abstract:
This invention is characterized in being provided with three or more arcuate silicon members (38) and a joining part for joining the silicon members (38), the joining part containing boron oxide.

Inventors:
IKARI Atsushi (587-49, Oaza Tokuyama Shunan-sh, Yamaguchi 51, 〒7450851, JP)
FUJII Satoshi (44-19, Higashioizumi 6-chome Nerima-k, Tokyo 63, 〒1780063, JP)
Application Number:
JP2017/027559
Publication Date:
February 08, 2018
Filing Date:
July 28, 2017
Export Citation:
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Assignee:
THINKON NEW TECHNOLOGY JAPAN CORPORATION (30-10, Toyotamakita 4-chome Nerima-k, Tokyo 12, 〒1760012, JP)
International Classes:
H01L21/3065; H05H1/46
Attorney, Agent or Firm:
YOSHIDA Tadanori (411 La Tour Shinjuku, 15-1 Nishishinjuku 6-chome, Shinjuku-k, Tokyo 23, 〒1600023, JP)
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