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Title:
ROBOT ARM
Document Type and Number:
WIPO Patent Application WO/2011/155320
Kind Code:
A1
Abstract:
A robot arm for conveying semiconductor wafers. The robot arm is provided with a hand, a forearm linkage, and an upper arm linkage. The hand is connected to the forearm linkage through a first joint. The upper arm linkage is connected to the forearm linkage through a second joint. In the robot arm, the forearm linkage can be divided at a position between the first joint and the second joint.

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Inventors:
SHIMAMOTO MITSURU (JP)
MAEKAWA TAKAHIRO (JP)
Application Number:
PCT/JP2011/061828
Publication Date:
December 15, 2011
Filing Date:
May 24, 2011
Export Citation:
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Assignee:
NABTESCO CORP (JP)
SHIMAMOTO MITSURU (JP)
MAEKAWA TAKAHIRO (JP)
International Classes:
H01L21/677; B25J9/06
Domestic Patent References:
WO2001062448A12001-08-30
Foreign References:
JPH07108483A1995-04-25
JPH06262555A1994-09-20
JPH04130190U1992-11-30
JP2000150617A2000-05-30
JP2000195923A2000-07-14
Attorney, Agent or Firm:
KAI-U PATENT LAW FIRM (JP)
Patent business corporation KAI-U Patent Law Firm (JP)
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