Title:
ROBOT ARM
Document Type and Number:
WIPO Patent Application WO/2011/155320
Kind Code:
A1
Abstract:
A robot arm for conveying semiconductor wafers. The robot arm is provided with a hand, a forearm linkage, and an upper arm linkage. The hand is connected to the forearm linkage through a first joint. The upper arm linkage is connected to the forearm linkage through a second joint. In the robot arm, the forearm linkage can be divided at a position between the first joint and the second joint.
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Inventors:
SHIMAMOTO Mitsuru (Nabtesco Corporation 594, Icchoda, Katada-cho, Tsu-sh, Mie 33, 〒5148533, JP)
島本 光 (〒33 三重県津市片田町壱町田５９４番地 ナブテスコ株式会社 津工場内 Mie, 〒5148533, JP)
島本 光 (〒33 三重県津市片田町壱町田５９４番地 ナブテスコ株式会社 津工場内 Mie, 〒5148533, JP)
Application Number:
JP2011/061828
Publication Date:
December 15, 2011
Filing Date:
May 24, 2011
Export Citation:
Assignee:
Nabtesco Corporation (7-9 Hirakawacho 2-chome, Chiyoda-ku Tokyo, 93, 〒1020093, JP)
ナブテスコ株式会社 (〒93 東京都千代田区平河町ニ丁目７番９号 Tokyo, 〒1020093, JP)
SHIMAMOTO Mitsuru (Nabtesco Corporation 594, Icchoda, Katada-cho, Tsu-sh, Mie 33, 〒5148533, JP)
ナブテスコ株式会社 (〒93 東京都千代田区平河町ニ丁目７番９号 Tokyo, 〒1020093, JP)
SHIMAMOTO Mitsuru (Nabtesco Corporation 594, Icchoda, Katada-cho, Tsu-sh, Mie 33, 〒5148533, JP)
International Classes:
H01L21/677; B25J9/06
Attorney, Agent or Firm:
KAI-U PATENT LAW FIRM (NISSEKI MEIEKI BUILDING 7F, 45-14, Meieki 2-chome, Nakamura-ku,,Nagoya-sh, Aichi 02, 〒4500002, JP)
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Claims:
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