Title:
ROBOT DIAGNOSIS SYSTEM AND ROBOT DIAGNOSIS METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2012/099342
Kind Code:
A2
Abstract:
The present invention relates to a robot diagnosis system and to a robot diagnosis method using same. In particular, an operating state of a robot may be monitored in real-time to systematize a process schedule of a wafer and a maintenance and repair plan for the robot. For this purpose, the present invention relates to a diagnosis system for diagnosing the operation of each robot disposed within a chamber of each piece of equipment installed in each bay. The diagnosis system includes: a capture module (30) that collects a command signal, which is a preset reference value, applied to a robot (T) to operate the robot (T) and a feedback signal corresponding to an actual operation of the robot (T) from a driver module (20), which is a controller, so as to transmit the collected signals to the outside; a computation module (40) generating computation data through a preset algorithm with respect to a deviation between the command signal and the feedback signal which are transmitted from the capture module (30) in order to ascertain the operating state of the robot (T); and a screen module (50) displaying the resultant value using numerical values and graphs in real-time on the basis of the computation data.
Inventors:
YUN, Hea-Keun (#948-901 Moamiredo Apt, Neung-dongHwaseong-si, Gyeonggi-do 445-787, 445-787, KR)
윤해근 (경기도 화성시 능동 모아미래도아파트 948-901호, 445-787 Gyeonggi-do, 445-787, KR)
SEO, Kang-Yeol (#104-808 Seongji Apt, Gwonseon-dong Gwonseon-g, Suwon-si Gyeonggi-do 441-718, 441-718, KR)
윤해근 (경기도 화성시 능동 모아미래도아파트 948-901호, 445-787 Gyeonggi-do, 445-787, KR)
SEO, Kang-Yeol (#104-808 Seongji Apt, Gwonseon-dong Gwonseon-g, Suwon-si Gyeonggi-do 441-718, 441-718, KR)
Application Number:
KR2011/009895
Publication Date:
July 26, 2012
Filing Date:
December 21, 2011
Export Citation:
Assignee:
HAPPY GLOBAL SOLUTION CO., LTD. (614-6 Oesammi-dong, Osan-si, Gyeonggi-do 447-230, 447-230, KR)
주식회사 해피글로벌솔루션 (경기도 오산시 외삼미동 614-6, 447-230 Gyeonggi-do, 447-230, KR)
YUN, Hea-Keun (#948-901 Moamiredo Apt, Neung-dongHwaseong-si, Gyeonggi-do 445-787, 445-787, KR)
윤해근 (경기도 화성시 능동 모아미래도아파트 948-901호, 445-787 Gyeonggi-do, 445-787, KR)
주식회사 해피글로벌솔루션 (경기도 오산시 외삼미동 614-6, 447-230 Gyeonggi-do, 447-230, KR)
YUN, Hea-Keun (#948-901 Moamiredo Apt, Neung-dongHwaseong-si, Gyeonggi-do 445-787, 445-787, KR)
윤해근 (경기도 화성시 능동 모아미래도아파트 948-901호, 445-787 Gyeonggi-do, 445-787, KR)
International Classes:
B25J19/06; B65G49/07; G05B19/18; H01L21/677
Attorney, Agent or Firm:
KIM, Do-Hyoung (# Daewoo Worldmark, 996-3 Yongtong-dong Yongtong-g, Suwon-si Gyeonggi-do 443-851, 443-851, KR)
Claims: