Title:
ROBOT HAND EQUIPPED WITH PAD MEMBER
Document Type and Number:
WIPO Patent Application WO/2020/003979
Kind Code:
A1
Abstract:
This robot hand (100), that is attached to a robot arm for transferring a substrate and holds the substrate, is equipped with a hand body part (110) and a pad member (1) that is attached to an opening section (101) provided in the hand body part (110) and holds the substrate. The pad member (1) is equipped with: a pad body part (2) that is attached to the opening section (101) of the robot hand (100) and has, in the center section thereof, a through-hole (5); a first annular part (31A) that is provided on the tip side of the pad member (1) and is brought into contact with the substrate; and a first flange part (32A) that is provided integrally with the first annular part (31A) and the pad body part (2) and extends toward the outside of the pad body part (2).
More Like This:
| JP2569052 | [Name of device] Wafer loading guide |
| JP2018174186 | SUBSTRATE PROCESSING APPARATUS |
| WO/1984/003412 | TRACK FOR FLOATING TRANSPORT OF SUBSTRATES |
Inventors:
WATANABE HIROKI (JP)
SAKAI TETSUYA (JP)
SAKAI TETSUYA (JP)
Application Number:
PCT/JP2019/022813
Publication Date:
January 02, 2020
Filing Date:
June 07, 2019
Export Citation:
Assignee:
HIRATA SPINNING (JP)
International Classes:
H01L21/677; B25J15/06
Foreign References:
| JP2008282870A | 2008-11-20 | |||
| JPH08112793A | 1996-05-07 | |||
| JP2002066972A | 2002-03-05 | |||
| JP2014072262A | 2014-04-21 | |||
| JPH08107136A | 1996-04-23 | |||
| JP2004059229A | 2004-02-26 | |||
| JPS6094487U | 1985-06-27 | |||
| JPH10156778A | 1998-06-16 |
Attorney, Agent or Firm:
SHIN-EI PATENT FIRM, P.C. (JP)
Download PDF:
Previous Patent: AGENT FOR ENHANCING PHAGOCYTOSIS ABILITY OF NEUTROPHILS
Next Patent: SOLID-STATE IMAGING ELEMENT AND ELECTRONIC APPARATUS
Next Patent: SOLID-STATE IMAGING ELEMENT AND ELECTRONIC APPARATUS