Title:
ROBOT HAND WITH POSITIONING FUNCTION FOR SEMICONDUCTOR WAFER AND LIQUID CRYSTAL GLASS SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2003/024673
Kind Code:
A1
Abstract:
A robot hand for positioning oriental flats and V−notches provided in a semiconductor wafer and a liquid crystal glass substrate by receiving the wafer and the substrate on a free roller and a drive roller installed on the robot hand, rotating, and holding by the vertical parts of both rollers, whereby, since the positions of the V−notches can be determined by placing the objects on the free roller and the drive roller, rotating by the drive roller, and holding by the slide mechanism of the drive roller, a positioning operation can be performed while a robot is being operated to shorten the cycle time for the operation of the robot, dust due to rubbing of the easy−to−chip objects such as a silicon wafer is not produced since a holding operation is performed while the objects are being rotated and, since dedicated equipment called an aligner used for the positioning of the objects is eliminated by the adoption of the robot hand, a cycle time for feeding the objects to production equipment can be shortened to increase a production efficiency.
Inventors:
HAYASHI TAKEHIDE (JP)
Application Number:
PCT/JP2002/004604
Publication Date:
March 27, 2003
Filing Date:
May 13, 2002
Export Citation:
Assignee:
HAYASHI TAKEHIDE (JP)
International Classes:
H01L21/677; H01L21/68; H01L21/687; (IPC1-7): B25J15/08; H01L21/68
Foreign References:
| JP2001093968A | 2001-04-06 | |||
| JPS63110037U | 1988-07-15 | |||
| JP2000072249A | 2000-03-07 | |||
| JP5057653B2 | 2012-10-24 | |||
| JPH0318435Y2 | 1991-04-18 |
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