Title:
ROBOT SYSTEM, ALIGNER, AND ALIGNMENT METHOD FOR SEMICONDUCTOR SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2024/075818
Kind Code:
A1
Abstract:
In a robot system (100), a control unit (23) performs position identification control without stopping the rotation of a placement part (21) for detecting a marker (112), and, after a position (P2) of the marker (112) has been identified, performs alignment control while maintaining the rotation direction of the placement part (21) without stopping the rotation of the placement part (21).
Inventors:
KITANO SHINYA
KATO TADAHIRO
NAKAYA ATSUSHI
ARAI YOHEI
KATO TADAHIRO
NAKAYA ATSUSHI
ARAI YOHEI
Application Number:
PCT/JP2023/036406
Publication Date:
April 11, 2024
Filing Date:
October 05, 2023
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
H01L21/68
Attorney, Agent or Firm:
MIYAZONO Hirokazu (JP)
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