Title:
ROBOT SYSTEM, END EFFECTOR SYSTEM, END EFFECTOR UNIT, AND ADAPTER
Document Type and Number:
WIPO Patent Application WO/2020/208826
Kind Code:
A1
Abstract:
This robot system is provided with: an end effector capable of working on a workpiece; a support unit that supports the end effector in the state where the end effector is displaceable; a first driving unit capable of driving the end effector via the support unit at a first stroke; a detection unit that detects the position of the end effector; and a second driving unit that is disposed between the support unit and the end effector and that is capable of driving, on the basis of position information of the end effector detected by the detection unit, the end effector at a second stroke smaller than the first stroke with respect to the support unit.
Inventors:
SATO SHINJI (JP)
Application Number:
PCT/JP2019/016043
Publication Date:
October 15, 2020
Filing Date:
April 12, 2019
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B25J13/08
Domestic Patent References:
| WO2017221717A1 | 2017-12-28 |
Foreign References:
| JP2015009287A | 2015-01-19 | |||
| JP2017124448A | 2017-07-20 | |||
| JP2018094654A | 2018-06-21 | |||
| JP2017074647A | 2017-04-20 | |||
| JP2019038089A | 2019-03-14 | |||
| JP2010000562A | 2010-01-07 | |||
| JP2018001370A | 2018-01-11 | |||
| JPH01240287A | 1989-09-25 | |||
| JP2015199128A | 2015-11-12 | |||
| JP2009184055A | 2009-08-20 | |||
| US4994639A | 1991-02-19 |
Other References:
See also references of EP 3954508A4
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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