Title:
ROBOT SYSTEMS, APPARATUS, AND METHODS ADAPTED TO PROCESS SUBSTRATES IN MULTIPLE TIERS
Document Type and Number:
WIPO Patent Application WO/2013/023092
Kind Code:
A3
Abstract:
Substrate transport systems, apparatus, and methods are described. In one aspect, the systems are disclosed having vertically stacked transfer chamber bodies. In one embodiment, a common robot apparatus services process chambers or load lock chambers coupled to upper and lower transfer chamber bodies. In another embodiment, separate robot apparatus service the process chambers and/or load lock chambers coupled to upper and lower transfer chamber bodies, and an elevator apparatus transfers the substrates between the various elevations. Degassing apparatus are described, as are numerous other aspects.
Inventors:
ENGLHARDT ERIC A (US)
GILJUM RICHARD (US)
HUDGENS JEFFREY C (US)
KOGAN IGOR G (US)
RICE MICHAEL ROBERT (US)
KOSHTI SUSHANT S (US)
GILJUM RICHARD (US)
HUDGENS JEFFREY C (US)
KOGAN IGOR G (US)
RICE MICHAEL ROBERT (US)
KOSHTI SUSHANT S (US)
Application Number:
PCT/US2012/050196
Publication Date:
April 04, 2013
Filing Date:
August 09, 2012
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
ENGLHARDT ERIC A (US)
GILJUM RICHARD (US)
HUDGENS JEFFREY C (US)
KOGAN IGOR G (US)
RICE MICHAEL ROBERT (US)
KOSHTI SUSHANT S (US)
ENGLHARDT ERIC A (US)
GILJUM RICHARD (US)
HUDGENS JEFFREY C (US)
KOGAN IGOR G (US)
RICE MICHAEL ROBERT (US)
KOSHTI SUSHANT S (US)
International Classes:
H01L21/677; B25J9/04; B65G49/07; H01L21/02
Foreign References:
| US6176667B1 | 2001-01-23 | |||
| JP2001160578A | 2001-06-12 | |||
| US6929774B2 | 2005-08-16 | |||
| JP2003013215A | 2003-01-15 |
Attorney, Agent or Firm:
DUGAN, Brian M. et al. (Pc245 Saw Mill River Road, Suite 30, Hawthorne New York, US)
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