Title:
ROLLER MOLD MANUFACTURING DEVICE AND MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/158714
Kind Code:
A1
Abstract:
A phenomenon where a rendered pattern becomes unclear due to rotational runout of a roller mold in the direction of a rotation axis is curbed while restraining an increase in the cost. For the purpose of achieving the above, a roller mold manufacturing device (1) is provided with an electron beam radiation device (2); a mask (3) which has an opening that allows passage of some of electron beams, and which forms a plurality of electron beams that perform simultaneous rendering on a resist; a rotation drive device (4) which rotates a roller mold (100) around a rotation axis (8); a displacement amount sensor (5) which detects the rotational runout displacement amount of the roller mold (100) in the direction of the rotation axis (8); a control device (6); and an actuator (7) which, on the basis of a control signal from the control device (6), causes a position rendered by electron beams to follow the displacement of the roller mold (100) in the direction of the rotation axis (8). The roller mold manufacturing device (1) restricts misalignment of an exposed position of the resist, said misalignment being caused by rotational runout displacement of the roller mold (100) in the direction of the rotation axis (8).
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Inventors:
ITO, Naoto (1-105, Kanda Jinbocho Chiyoda-k, Tokyo 01, 〒1018101, JP)
伊藤 直人 (〒01 東京都千代田区神田神保町一丁目１０５番地 Tokyo, 〒1018101, JP)
KITADA, Toshio (1-105, Kanda Jinbocho Chiyoda-k, Tokyo 01, 〒1018101, JP)
伊藤 直人 (〒01 東京都千代田区神田神保町一丁目１０５番地 Tokyo, 〒1018101, JP)
KITADA, Toshio (1-105, Kanda Jinbocho Chiyoda-k, Tokyo 01, 〒1018101, JP)
Application Number:
JP2011/063149
Publication Date:
December 22, 2011
Filing Date:
June 08, 2011
Export Citation:
Assignee:
Asahi Kasei Engineering Corporation (3-23, Nakanoshima 3-chome Kita-ku, Osaka-sh, Osaka 05, 〒5308205, JP)
旭化成エンジニアリング株式会社 (〒05 大阪府大阪市北区中之島三丁目３番２３号 Osaka, 〒5308205, JP)
ITO, Naoto (1-105, Kanda Jinbocho Chiyoda-k, Tokyo 01, 〒1018101, JP)
伊藤 直人 (〒01 東京都千代田区神田神保町一丁目１０５番地 Tokyo, 〒1018101, JP)
旭化成エンジニアリング株式会社 (〒05 大阪府大阪市北区中之島三丁目３番２３号 Osaka, 〒5308205, JP)
ITO, Naoto (1-105, Kanda Jinbocho Chiyoda-k, Tokyo 01, 〒1018101, JP)
伊藤 直人 (〒01 東京都千代田区神田神保町一丁目１０５番地 Tokyo, 〒1018101, JP)
International Classes:
B29C59/04; B29C33/38; G03F7/20
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (TMI ASSOCIATES, 23rd Floor Roppongi Hills Mori Tower, 6-10-1, Roppongi, Minato-k, Tokyo 23, 〒1066123, JP)
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Claims: