Title:
ROLLER-TYPE PRESSURIZATION DEVICE, IMPRINTER, AND ROLLER-TYPE PRESSURIZATION METHOD
Document Type and Number:
WIPO Patent Application WO/2014/088107
Kind Code:
A1
Abstract:
The present invention provides a roller-type pressurization device that controls the pressure of a roller to enable pressure to be applied to an object such as a die or an article to be molded, and also provides an imprinter and an imprinting method in which the roller-type pressurization device is used. The roller-type pressurization device is used for causing an object such as a die (1) or an article to be molded (2) to be pressurized using a main roller (38), wherein the roller-type pressurization device comprises a pressure-adjusting plate, a roller-moving means, a pressure-adjusting unit, a pressure-receiving stage (322), a pressure-adjusting means, and a pressure-equalizing means (back up roller (39)). The main roller (38) is disposed in the pressure-adjusting plate, and the roller-moving means moves the main roller (38) in relation to the object. The pressure-adjusting unit holds the pressure-adjusting plate (332) so that the force generated by the pressure difference of a fluid being applied to both surfaces of the pressure-adjusting plate (332) is applied to the main roller (38). The pressure-receiving stage (322) receives the pressure of the main roller (38) with the object sandwiched therebetween. The pressure-adjusting means adjusts the pressure difference of the fluid applied on both surfaces of the pressure-adjusting plate (332). The pressure-equalizing means equalizes the pressure of the main roller (38) applied in an axial direction to the object.
Inventors:
KAWAGUCHI HIROSUKE (JP)
TANIGUCHI YUTAKA (JP)
TANAKA SATORU (JP)
TANIGUCHI YUTAKA (JP)
TANAKA SATORU (JP)
Application Number:
PCT/JP2013/082888
Publication Date:
June 12, 2014
Filing Date:
December 06, 2013
Export Citation:
Assignee:
SCIVAX CORP (JP)
International Classes:
B29C59/02; H01L21/027
Domestic Patent References:
| WO2012029843A1 | 2012-03-08 | |||
| WO2013191206A1 | 2013-12-27 | |||
| WO2004062886A1 | 2004-07-29 |
Foreign References:
| JP2005178368A | 2005-07-07 | |||
| JP2001058352A | 2001-03-06 | |||
| JP2013119254A | 2013-06-17 | |||
| JP2009154393A | 2009-07-16 |
Other References:
See also references of EP 2930006A4
Attorney, Agent or Firm:
OKUDA Noritsugu (JP)
Okuda 律次 (JP)
Okuda 律次 (JP)
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