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Patent Searching and Data


Title:
ROLLING-TYPE FILM FORMATION DEVICE AND ROLLING-TYPE FILM FORMATION METHOD
Document Type and Number:
WIPO Patent Application WO/2018/128025
Kind Code:
A1
Abstract:
[Problem] To suppress heat damage to a film when a lithium layer is formed on the film by a rolling method. [Solution] A rolling-type film formation device is provided with a vacuum container, a film running mechanism, a lithium source, and a first roller. A depressurized state can be maintained in the vacuum container. The film running mechanism can cause the film to run within the vacuum container. The lithium source can melt lithium in the vacuum container. The first roller is disposed between a formation surface of the film and the lithium source. The first roller has a transfer pattern that receives the melted lithium from the lithium source. The first roller transfers a pattern of the lithium layer corresponding to the transfer pattern to the film formation surface while rotating.

Inventors:
SAKAMOTO, Junichi (INC. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
SAITO, Kazuya (INC. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
KIYOTA, Junya (INC. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
TAKEI, Masaki (INC. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
YOKOYAMA, Akihiro (INC. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
Application Number:
JP2017/042071
Publication Date:
July 12, 2018
Filing Date:
November 22, 2017
Export Citation:
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Assignee:
ULVAC, INC. (2500 Hagisono, Chigasaki-shi Kanagawa, 43, 〒2538543, JP)
International Classes:
B05C1/08; B05D1/28; B05D3/10; B05D3/12; B05D7/04; B05D7/24; B41F5/04; B41F17/10; B41M1/02; B41M1/10; B41M1/28; B41M1/30; B65H20/02; C23C14/56
Foreign References:
JP2007273459A2007-10-18
JP2013100581A2013-05-23
JP2015199986A2015-11-12
JP2011089160A2011-05-06
JP2013127086A2013-06-27
JP2004063458A2004-02-26
Attorney, Agent or Firm:
OMORI, Junichi (2nd Floor U&M Akasaka Bldg, 7-5-47 Akasaka Minato-k, Tokyo 52, 〒1070052, JP)
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