Title:
ROTARY JOINT FOR FLUID
Document Type and Number:
WIPO Patent Application WO/1999/024219
Kind Code:
A1
Abstract:
A rotary joint for a fluid capable of fluidizing under a seal state a polishing solution between relative rotary members and supplying power to a polishing surface detector, wherein a series of polishing solution passages (7) communicating with one another through seal spaces (50) sealed by a pair of seal devices equipped with seal rings (51, 52) rotating and sliding relatively to each other are defined between a joint main body (1) and a rotary body (2). A power distribution route reaching the polishing surface detector (110) comprises a rotary connector (4) for connecting a first connector (41) on the side of a casing (40) held by the rotary body and a second connector (42) on the side of the joint main body in such a manner as to be capable of rotating relative to each other, a cable (42a) extending from a power source (3) to the second connector and a cable (41a) extending from the first connector to the polishing surface detector through a cable insertion passage (24) formed in the rotary body.
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Inventors:
OMIYA JUNJI (JP)
WADA MASATO (JP)
WADA MASATO (JP)
Application Number:
PCT/JP1998/004953
Publication Date:
May 20, 1999
Filing Date:
October 30, 1998
Export Citation:
Assignee:
NIPPON PILLAR PACKING (JP)
OMIYA JUNJI (JP)
WADA MASATO (JP)
OMIYA JUNJI (JP)
WADA MASATO (JP)
International Classes:
F16L27/093; B24B41/04; B24B55/02; (IPC1-7): B24B55/02; B24B37/04
Foreign References:
| JPH0631583A | 1994-02-08 | |||
| JPH0617861U | 1994-03-08 | |||
| JPH02124269A | 1990-05-11 | |||
| US4765096A | 1988-08-23 | |||
| JPS5775777A | 1982-05-12 |
Other References:
See also references of EP 0958890A4
Attorney, Agent or Firm:
Sugimoto, Takeo (Kitahama 2-chome Chuo-ku Osaka-shi Osaka, JP)
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