Title:
ROTARY TARGET LOCKING RING ASSEMBLY
Document Type and Number:
WIPO Patent Application WO/2005/108646
Kind Code:
A3
Abstract:
The present invention comprises a locking ring assembly (90) for a rotary target
(140, 140', 140", 140'") used in a physical deposition
process of the type that comprises at least one rotary target segment (140, 140',
140", 140'") mechanically disposed on a backing tube. The locking
ring assembly comprises an inner ring 20 and an outer ring (42), both comprising
cooperative threading. The inner ring (20) comprises two or more separable segments
(22, 24).
Inventors:
WITYAK GOERGE M (US)
WEBB BRUCE W (US)
WEBB BRUCE W (US)
Application Number:
PCT/US2005/015475
Publication Date:
January 25, 2007
Filing Date:
April 29, 2005
Export Citation:
Assignee:
ACADEMY CORP (US)
WITYAK GOERGE M (US)
WEBB BRUCE W (US)
WITYAK GOERGE M (US)
WEBB BRUCE W (US)
International Classes:
C23C14/35; C23C14/00; C23C14/34; C25B9/00; H01J37/34
Foreign References:
| US6375815B1 | 2002-04-23 | |||
| US5026360A | 1991-06-25 | |||
| US4443318A | 1984-04-17 |
Attorney, Agent or Firm:
OAXACA, Vidal, A. (P.C. PO Box 2692, Albuquerque NM, US)
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