Title:
ROTATING TYPE CHARGE CONVERTING FILM OF ION BEAM CHARGE CONVERTING DEVICE AND ION BEAM CHARGE CONVERTING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/025746
Kind Code:
A1
Abstract:
The objective of the present invention is to provide a charge converting film of an ion beam charge converting device which has high heat resistance and no toxicity, with which there is no risk of activation, with which an ion beam can be made multivalent even with a thin film, and which is resistant to high-energy beam irradiation over an extended period of time. This rotating type charge converting film is a charge converting film used in a device which converts an ion beam charge, wherein the charge converting film comprises a carbon film having a thermal conductivity at least equal to 20 W/mK in the film surface direction at 25ºC, and the film thickness of the carbon film is more than 3 µm and less than 10 µm. Further, the rotating type charge converting film is a charge converting film used in a device which converts an ion beam charge, wherein the charge converting film comprises a carbon film manufactured by means of a polymer baking method, and the film thickness of the carbon film is more than 3 µm and less than 10 µm.
Inventors:
MURAKAMI MUTSUAKI (JP)
TACHIBANA MASAMITSU (JP)
TATAMI ATSUSHI (JP)
HASEBE HIROO (JP)
TACHIBANA MASAMITSU (JP)
TATAMI ATSUSHI (JP)
HASEBE HIROO (JP)
Application Number:
PCT/JP2017/027254
Publication Date:
February 08, 2018
Filing Date:
July 27, 2017
Export Citation:
Assignee:
KANEKA CORP (JP)
RIKEN (JP)
RIKEN (JP)
International Classes:
G21K1/14; C01B32/182; G21K1/00; G21K5/08
Domestic Patent References:
| WO2015045641A1 | 2015-04-02 | |||
| WO2007058224A1 | 2007-05-24 |
Foreign References:
| JP2012099354A | 2012-05-24 | |||
| JP2010257664A | 2010-11-11 | |||
| JP2010287419A | 2010-12-24 | |||
| JP2011522364A | 2011-07-28 |
Other References:
See also references of EP 3496111A4
Attorney, Agent or Firm:
UEKI, Kyuichi et al. (JP)
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