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Title:
ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES
Document Type and Number:
WIPO Patent Application WO/2019/140057
Kind Code:
A1
Abstract:
A rotational indexer is provided that may be rotated to move semiconductor wafers or other items between various stations arranged in a circular array; the items being moved may be supported by arms of the indexer during such movement. The rotational indexer may be further configured to also cause the items being moved to rotate about other rotational axes to cause rotation of the items relative to the arms supporting them.

Inventors:
BLANK RICHARD M (US)
LEESER KARL F (US)
Application Number:
PCT/US2019/013000
Publication Date:
July 18, 2019
Filing Date:
January 10, 2019
Export Citation:
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Assignee:
LAM RES CORP (US)
International Classes:
H01L21/677; H01L21/68; H01L21/687
Foreign References:
US20160138159A12016-05-19
US20010033144A12001-10-25
US20170076972A12017-03-16
US20150332912A12015-11-19
US20170113345A12017-04-27
EP0774323A21997-05-21
Other References:
See also references of EP 3738142A4
Attorney, Agent or Firm:
SCHOLZ, Christian D. et al. (US)
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