Title:
RUTHENIUM COMPOUND, RAW MATERIAL FOR THIN FILM FORMATION, AND METHOD FOR FORMING THIN FILM
Document Type and Number:
WIPO Patent Application WO/2020/255822
Kind Code:
A1
Abstract:
The present invention provides a ruthenium compound represented by general formula (1) or (2), a raw material for thin film formation containing the same, and a method for producing a thin film using the raw material for thin film formation. Formula (1) (In the formula, R1-R12 each independently represent a hydrogen atom, a C1-5 alkyl group, or a fluorine atom, and n represents an integer of 0-2. However, at least one of R1-R12 is a fluorine atom-containing group.) Formula (2) (In the formula, R13-R17 each independently represent a hydrogen atom or a C1-5 alkyl group, and the total number of carbon atoms in R13-R17 is 3 or more.)
Inventors:
ENZU MASAKI (JP)
HATASE MASAKO (JP)
TAKEDA KEISUKE (JP)
HATASE MASAKO (JP)
TAKEDA KEISUKE (JP)
Application Number:
PCT/JP2020/022828
Publication Date:
December 24, 2020
Filing Date:
June 10, 2020
Export Citation:
Assignee:
ADEKA CORP (JP)
International Classes:
C07F15/00; C23C16/18
Foreign References:
| JP2009536267A | 2009-10-08 | |||
| JP2016074929A | 2016-05-12 | |||
| JP2005060814A | 2005-03-10 | |||
| JP2015153993A | 2015-08-24 |
Other References:
KIRSS; HENRIKSEN R U; FORSYTH A; FEIGHERY D A; W: "Synthesis, characterization and electrochemistry of bis(3- aryl-6,6-dimethylcyclohexadienyl)rutheniumu complexes", INORGANICA CHIMICA ACTA, vol. 359, no. 13, 1 October 2006 (2006-10-01), pages 4393 - 4397, XP005633651
GUSEV O V; IEVLEV M A; PEGANOVA T A; PETERLEITNER M G; PETROVSKII P V; OPRUNENKO Y F; USTYNYUK N A: "Synthesis and reduction of trifluoromethyl-substituted arenecyclopentadienylruthenium sandwiches [Ru(eta 5-C5Me4CF3)(eta 6-C6R6)]+(R=H, Me) and [Ru( eta 5-C5Me5)( eta 6-C6H5CF3)]+", JOURNAL OF ORGANOMETALLIC CHEMISTRY, vol. 551, no. 1-2, 30 January 1998 (1998-01-30), pages 93 - 100, XP004197052
PIKE JACK A., WALTON JAMES W.: "Nucleophilic trifluoromethylation of electron-deficient arenes", CHEMICAL COMMUNICATIONS, vol. 53, no. 71, 14 August 2017 (2017-08-14), pages 9858 - 9861, XP055773759
TRAKARNPRUK WIMONRAT, ARIF ATTA M, ERNST RICHARD D: "Half-Open Ruthenocenes Derived from [Ru(C5Me5)Cl]4: Syntheses, Characterizations, and Sol id-State Structures", ORGANOMETALLICS, vol. 11, no. 4, 1 April 1992 (1992-04-01), pages 1686 - 1692, XP055773766
GUSEV O V; IEVLEV M A; PEGANOVA T A; PETERLEITNER M G; PETROVSKII P V; OPRUNENKO Y F; USTYNYUK N A: "Synthesis and reduction of trifluoromethyl-substituted arenecyclopentadienylruthenium sandwiches [Ru(eta 5-C5Me4CF3)(eta 6-C6R6)]+(R=H, Me) and [Ru( eta 5-C5Me5)( eta 6-C6H5CF3)]+", JOURNAL OF ORGANOMETALLIC CHEMISTRY, vol. 551, no. 1-2, 30 January 1998 (1998-01-30), pages 93 - 100, XP004197052
PIKE JACK A., WALTON JAMES W.: "Nucleophilic trifluoromethylation of electron-deficient arenes", CHEMICAL COMMUNICATIONS, vol. 53, no. 71, 14 August 2017 (2017-08-14), pages 9858 - 9861, XP055773759
TRAKARNPRUK WIMONRAT, ARIF ATTA M, ERNST RICHARD D: "Half-Open Ruthenocenes Derived from [Ru(C5Me5)Cl]4: Syntheses, Characterizations, and Sol id-State Structures", ORGANOMETALLICS, vol. 11, no. 4, 1 April 1992 (1992-04-01), pages 1686 - 1692, XP055773766
Attorney, Agent or Firm:
SOGA, Michiharu et al. (JP)
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