Title:
SINTERED Sn-Zn-O OXIDE AND PROCESS FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2017/086016
Kind Code:
A1
Abstract:
[Problem] To provide a sintered Sn-Zn-O oxide which has mechanical strength, a high density, and a low resistance and is for use as a sputtering target and a process for producing the sintered oxide. [Solution] This sintered oxide is characterized by containing Sn in a proportion of 0.1-0.9 in terms of atomic ratio Sn/(Sn+Zn), containing at least one first additive element M selected from among Si, Ti, Ge, In, Bi, Ce, Al, and Ga, and containing at least one second additive element X selected from among Nb, Ta, W, and Mo, the first additive element M being contained in a proportion of 0.0001-0.04 in terms of atomic ratio to the sum of all the metallic elements, M/(Sn+Zn+M+X), and the second additive element X being contained in a proportion of 0.0001-0.1 in terms of atomic ratio to the sum of all the metallic elements, X/(Sn+Zn+M+X), and by having a relative density of 90% or higher and a resistivity of 1 Ω·cm or less.
Inventors:
OZAWA MAKOTO (JP)
IGARASHI SHIGERU (JP)
ANDO ISAO (JP)
IGARASHI SHIGERU (JP)
ANDO ISAO (JP)
Application Number:
PCT/JP2016/077670
Publication Date:
May 26, 2017
Filing Date:
September 20, 2016
Export Citation:
Assignee:
SUMITOMO METAL MINING CO (JP)
International Classes:
C04B35/453; C04B35/457; C23C14/34; H01B1/08; H01B13/00; H01B5/14
Domestic Patent References:
| WO2014168224A1 | 2014-10-16 |
Foreign References:
| JP2015038027A | 2015-02-26 | |||
| JP2012066968A | 2012-04-05 | |||
| JP2007277075A | 2007-10-25 |
Attorney, Agent or Firm:
UEDA, Shozo et al. (JP)
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