SMIF container latch mechanism - ASYST TECHNOLOGIES

Title:

SMIF container latch mechanism

Document Type and Number:

WIPO Patent Application WO2002004322

Kind Code:

A3

Abstract:

The present invention includes a latch assembly, such as maybe useful for SMIF pods. SMIF pods are in general comprised of a pod door which mates with a pod shell to provide a sealed environment in which wafers may be stored and transferred. During wafer storage and transport, the pod door is typically held affixed to the pod shell by a latch assembly. When it is desired to separate the pod door from the pod shell, each latch must be actuated outwardly, to withdraw each engagement portion from the pod door, at which time the pod door may be separated. The present invention includes an improved such latch assembly.

Inventors:

SMITH MARK V (US)
WARTENBERGH ROBERT P (US)
PENNYBACKER WILLIAM P (US)

Application Number:

PCT/US2001/021694

Publication Date:

April 25, 2002

Filing Date:

July 10, 2001

Export Citation:

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Assignee:

ASYST TECHNOLOGIES (US)

International Classes:

B65D45/16; H01L21/673; H01L21/677; (IPC1-7): E05C1/04

Foreign References:

US4739882A	1988-04-26
US6106213A	2000-08-22
US6186331B1	2001-02-13

Other References: