SACRIFICAL DEVICE FOR PROTECTING AN OPTICAL ELEMENT IN A PATH OF A HIGH-POWER LASER BEAM

Title:

SACRIFICAL DEVICE FOR PROTECTING AN OPTICAL ELEMENT IN A PATH OF A HIGH-POWER LASER BEAM

Document Type and Number:

WIPO Patent Application WO/2020/126387

Kind Code:

A3

Abstract:

A system is configured to form a path for laser radiation (602). The system has an optical element (604) positioned in the path, and a sacrificial device (606) also positioned in the path and configured to protect the optical element.

Inventors:

MUYS PETER (NL)

Application Number:

PCT/EP2019/082875

Publication Date:

July 30, 2020

Filing Date:

November 28, 2019

Export Citation:

Click for automatic bibliography generation Help

Assignee:

ASML NETHERLANDS BV (NL)

International Classes:

H05G2/00; H01S3/00; H01S3/034

Foreign References:

US20140269794A1	2014-09-18
US20140084186A1	2014-03-27
US20060192151A1	2006-08-31
US20150146866A1	2015-05-28

Other References:

GOLDFARB DARIO L ET AL: "Thermomechanical behavior of EUV pellicle under dynamic exposure conditions", PROCEEDINGS OF SPIE; [PROCEEDINGS OF SPIE ISSN 0277-786X VOLUME 10524], SPIE, US, vol. 9776, 18 March 2016 (2016-03-18), pages 977621 - 977621, XP060067595, ISBN: 978-1-5106-1533-5, DOI: 10.1117/12.2218453

Attorney, Agent or Firm:

CRESPILLO MIRON, Carlos (NL)

Download PDF:

View/Download PDF PDF Help

Previous Patent: AGRICULTURAL SPRAYER WITH WARM WATER RINSE SYSTEM

Next Patent: DEVICE FOR LIGHTING THE PASSENGER COMPARTMENT OF A MOTOR VEHICLE, THE DEVICE BEING CAPABLE OF PROJEC...