Title:
SALT COMPOUND, AND QUENCHER AND PHOTORESIST COMPOSITION COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2023/113086
Kind Code:
A1
Abstract:
The present invention relates to: a salt compound comprising a negative ion having a specific structure represented by chemical formula 1, and a positive ion represented by chemical formula 2; a quencher including the salt compound; and a photoresist composition including the salt compound.
Inventors:
KIM JAEHYUN (KR)
HUR MYOUNG HYUN (KR)
KIM JEONG SIK (KR)
YOO MIN JA (KR)
LEE HYUNG KUN (KR)
HUR MYOUNG HYUN (KR)
KIM JEONG SIK (KR)
YOO MIN JA (KR)
LEE HYUNG KUN (KR)
Application Number:
PCT/KR2021/019567
Publication Date:
June 22, 2023
Filing Date:
December 22, 2021
Export Citation:
Assignee:
DONGJIN SEMICHEM CO LTD (KR)
International Classes:
C07C311/06; C07C25/18; C07C311/14; C07C311/17; C07C321/28; C07C323/22; C07C323/66; C07D319/20; G03F7/004
Domestic Patent References:
| WO2021251086A1 | 2021-12-16 |
Foreign References:
| JP2018060069A | 2018-04-12 | |||
| KR20180111596A | 2018-10-11 |
Other References:
KITA, F. KAWAKAMI, A. NIE, J. SONODA, T. KOBAYASHI, H.: "On the characteristics of electrolytes with new lithium imide salts", JOURNAL OF POWER SOURCES, ELSEVIER, AMSTERDAM, NL, vol. 68, no. 2, 1 October 1997 (1997-10-01), AMSTERDAM, NL, pages 307 - 310, XP005496923, ISSN: 0378-7753, DOI: 10.1016/S0378-7753(97)02528-7
Attorney, Agent or Firm:
YOU ME PATENT AND LAW FIRM (KR)
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