Title:
SAMPLE ASSEMBLY AND OPTICAL CONSTANT MEASUREMENT DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2015/133715
Kind Code:
A1
Abstract:
The present invention relates to a sample assembly and an optical constant measurement device using the same. The sample assembly of the present invention comprises: an electromagnetic wave generation part for oscillating a first electromagnetic wave by interacting with laser beams irradiated from a laser beam oscillator; and a sample layer comprising a sample laminated on the electromagnetic wave generation part, wherein the first electromagnetic wave is reflected from the sample layer and oscillated into a second electromagnetic wave. Also, the optical constant measurement device using the sample assembly of the present invention comprises: a laser beam oscillator for oscillating laser beams; a sample assembly for oscillating a first electromagnetic wave by interacting with the laser beams irradiated from the laser beam oscillator; and an optical constant calculation unit for receiving the first electromagnetic wave and a second electromagnetic wave and calculating optical constants for the sample using the first and second electromagnetic waves.
Inventors:
LEE JONG-SEOK (KR)
HAN JEONG-WOO (KR)
KO DO-KYEONG (KR)
YU NAN-EI (KR)
LEE KYU-SUP (KR)
HAN JEONG-WOO (KR)
KO DO-KYEONG (KR)
YU NAN-EI (KR)
LEE KYU-SUP (KR)
Application Number:
PCT/KR2014/013063
Publication Date:
September 11, 2015
Filing Date:
December 30, 2014
Export Citation:
Assignee:
KWANGJU INST SCI & TECH (KR)
International Classes:
G01N21/3581; G01N21/41
Foreign References:
| KR101296748B1 | 2013-08-20 | |||
| JP2009036693A | 2009-02-19 | |||
| US20130155410A1 | 2013-06-20 | |||
| KR20110031766A | 2011-03-29 | |||
| KR20090111809A | 2009-10-27 |
Attorney, Agent or Firm:
DAE-A INTELLECTUAL PROPERTY CONSULTING (KR)
특허법인 대아 (KR)
특허법인 대아 (KR)
Download PDF: