A SAMPLE ENCLOSURE FOR A SCANNING ELECTRON MICROSCOPE AND METHODS OF USE THEREOF

Title:

A SAMPLE ENCLOSURE FOR A SCANNING ELECTRON MICROSCOPE AND METHODS OF USE THEREOF

Document Type and Number:

WIPO Patent Application WO2003104846

Kind Code:

A3

Abstract:

An SEM compatible sample holder having a sample enclosure element (100) with a beam permeable /fluid impermeable membrane (108) over an aperture (106) to secure a fluid sample for observation with an electron beam.

Inventors:

SPRINZAK DAVID (IL)
NECHUSHTAN AMOTZ (IL)
ZIK ORY (IL)
GILEADI OFER (IL)

Application Number:

PCT/IL2003/000454

Publication Date:

April 15, 2004

Filing Date:

June 01, 2003

Export Citation:

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Assignee:

QUANTOMIX LTD (IL)
SPRINZAK DAVID (IL)
NECHUSHTAN AMOTZ (IL)
ZIK ORY (IL)
GILEADI OFER (IL)

International Classes:

G01N23/203; B01L3/00; G01N23/00; G01N23/225; G01N25/00; G21K5/08; G21K7/00; H01J3/14; H01J37/20; H01J37/22; H01J37/244; H01J37/252; H01J37/256; H01J37/28; G01N1/36; G02B; (IPC1-7): G21K5/08; G01N23/00; G01N25/00; H01J3/14

Foreign References:

US4705949A	1987-11-10
US5362964A	1994-11-08
US5097134A	1992-03-17

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