Title:
SAMPLE HOLDER AND ANALYTICAL VACUUM DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/083270
Kind Code:
A1
Abstract:
In the present invention, the transport of a sample among an FIB device, an electron microscope and an atom probe device is carried out safely and readily, allowing for an atom probe analysis of a material readily altered by atmospheric exposure.
The sample holder for holding a sample (12) is provided with an atmosphere-blocking mechanism for preventing the alteration of a sample by atmospheric exposure during sample transport between devices, and, as part of the atmosphere-blocking mechanism at the front end of the sample holder, a housing (21) having a structure allowing for attachment and detachment inside an analytical vacuum device such as an atom probe device.
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Inventors:
NAKAYAMA TAKESHI (JP)
HASHIZUME TOMIHIRO (JP)
SUGAWARA AKIRA (JP)
HASHIZUME TOMIHIRO (JP)
SUGAWARA AKIRA (JP)
Application Number:
PCT/JP2013/082708
Publication Date:
June 11, 2015
Filing Date:
December 05, 2013
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
H01J37/20; G01N1/28; G01N23/04; G01N23/225; G01N27/62; H01J37/317
Foreign References:
| JP2011090973A | 2011-05-06 | |||
| JP2003059440A | 2003-02-28 | |||
| JPH05307012A | 1993-11-19 | |||
| JP2001066231A | 2001-03-16 | |||
| JP2000215837A | 2000-08-04 | |||
| JP2002313271A | 2002-10-25 | |||
| JP2002310951A | 2002-10-23 |
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
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