Title:
SAMPLE HOLDER FOR SCANNING ELECTRON MICROSCOPE, SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION SYSTEM, AND SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION METHOD
Document Type and Number:
WIPO Patent Application WO/2014/167787
Kind Code:
A1
Abstract:
An aqueous solution (20) wherein an observation sample (10) is dissolved, etc., is sandwiched on a first insulating thin film (203) which is disposed below a conductive thin film (201). When an electron beam entry area is negatively charged, water molecule electric dipoles align along an electric potential gradient, and an electric charge arises on a surface of a second insulating thin film (204). This electric charge is detected by a terminal part (210) and becomes a measurement signal. In a state wherein the electron beam (102) is blocked, the negative potential is lost. The charge on the surface of the first insulating thin film (203) is thus also lost, and the measurement signal which is outputted from the terminal part (210) is also zero. By repeating such an electron beam on/off switching at a frequency greater than or equal to 1kHz, it is possible to extract a signal of a similar frequency component from the terminal part (210).
Inventors:
OGURA TOSHIHIKO (JP)
Application Number:
PCT/JP2014/001668
Publication Date:
October 16, 2014
Filing Date:
March 24, 2014
Export Citation:
Assignee:
NAT INST OF ADVANCED IND SCIEN (JP)
International Classes:
G01N23/00; H01J37/20; H01J37/244; H01J37/28; H01J37/22
Foreign References:
| JP2010097844A | 2010-04-30 | |||
| JP5115997B1 | 2013-01-09 | |||
| JP2010175389A | 2010-08-12 | |||
| JP2011007766A | 2011-01-13 | |||
| JP2008210715A | 2008-09-11 | |||
| JP2004515049A | 2004-05-20 | |||
| JP2008210765A | 2008-09-11 | |||
| JP2014022323A | 2014-02-03 | |||
| JP2010097844A | 2010-04-30 | |||
| JP5115997B1 | 2013-01-09 |
Other References:
T. OGURA: "A high contrast method of unstained biological samples under a thin carbon film by scanning electron microscopy", BIOCHEM. BIOPHYS. RES. COMMUN., vol. 377, 2008, pages 79 - 84, XP025587426, DOI: doi:10.1016/j.bbrc.2008.09.097
T. OGURA: "Direct observation of the inner structure of unstained atmospheric cells by low-energy electrons", MEAS. SCI. TECHNOL., vol. 23, 2012, pages 8, XP020227261, DOI: doi:10.1088/0957-0233/23/8/085402
S. THIBERGE ET AL.: "Scanning electron microscopy of cells and tissues under fully hydrated conditions", PNAS, vol. 101, 2004, pages 3346 - 3351, XP002473347, DOI: doi:10.1073/pnas.0400088101
T. OGURA: "Direct observation of the inner structure of unstained atmospheric cells by low-energy electrons", MEAS. SCI. TECHNOL., vol. 23, 2012, pages 8, XP020227261, DOI: doi:10.1088/0957-0233/23/8/085402
S. THIBERGE ET AL.: "Scanning electron microscopy of cells and tissues under fully hydrated conditions", PNAS, vol. 101, 2004, pages 3346 - 3351, XP002473347, DOI: doi:10.1073/pnas.0400088101
Attorney, Agent or Firm:
OHNO, Seiji et al. (JP)
Seiji Ono (JP)
Seiji Ono (JP)
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