Title:
SAMPLE HOLDER
Document Type and Number:
WIPO Patent Application WO/2014/098224
Kind Code:
A1
Abstract:
This electrostatic chuck is provided with: a base made from a ceramic, the base having a sample-holding surface on the upper surface and a heat medium channel in the interior; and a coating film coating the inner surface of the channel. The coating film is made from a ceramic that is harder than the ceramic constituting the base.
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Inventors:
SATO MASAHIRO (JP)
Application Number:
PCT/JP2013/084268
Publication Date:
June 26, 2014
Filing Date:
December 20, 2013
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/683; B23Q3/15; H01L21/02; H02N13/00
Foreign References:
| JP2003077996A | 2003-03-14 | |||
| JPH1044209A | 1998-02-17 | |||
| JPH0631711A | 1994-02-08 | |||
| JPS63209903A | 1988-08-31 | |||
| JPH0525637A | 1993-02-02 | |||
| JP2007043042A | 2007-02-15 | |||
| JP2007266342A | 2007-10-11 |
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