Title:
SAMPLE HOLDER
Document Type and Number:
WIPO Patent Application WO/2019/146796
Kind Code:
A1
Abstract:
A sample holder 10 according to the present disclosure is provided with: a plate-like insulating base material 1; a conductive member 2 which is provided on the lower surface of the insulating base material 1; a lead pin 3 which is bonded to the conductive member 2 and extends downwardly from the insulating base material 2; a cylindrical member 4 which is bonded to the lower surface of the insulating base material 1 and surrounds the lead pin 3; a first member 5 which is positioned inside the cylindrical member 4 and covers the bonded part of the conductive member 2 and the lead pin 3; and a second member 6 which covers the first member 5 and fills the inside of the cylindrical member 4. The first member 5 is in the form of a gel.
Inventors:
YAMAKUCHI MIKI (JP)
Application Number:
PCT/JP2019/002931
Publication Date:
August 01, 2019
Filing Date:
January 29, 2019
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/683; H02N13/00
Foreign References:
| JP2013191626A | 2013-09-26 | |||
| JPH02132954U | 1990-11-05 |
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