Title:
SAMPLE HOLDER
Document Type and Number:
WIPO Patent Application WO/2020/004309
Kind Code:
A1
Abstract:
This sample holder 10 includes: for example, a plate-like ceramic substrate 1; a heat generating resistive element 2; a metal member 3 that covers the other main surface of the ceramic substrate 1; an adhesive layer 4 that adheres the ceramic substrate 1 to the metal member 3; a lead terminal 5; a conducting part 6 that is provided inside the adhesive layer 4 and electrically connects the heat generating resistive element 2 to the lead terminal 5; and a connecting member 7 that connects the conducting part 6 to the lead terminal 5. The connecting member 7 is covered by a low heat conduction member 8 which has heat conductivity that is lower than the adhesive layer 4.
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| JPH03163849 | ELECTROSTATIC CHUCK |
| WO/2010/108462 | BERNOULLI GRIPPER APPARATUS HAVING AT LEAST ONE BERNOULLI GRIPPER |
Inventors:
SAISHO SEIYA (JP)
Application Number:
PCT/JP2019/024920
Publication Date:
January 02, 2020
Filing Date:
June 24, 2019
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/683; H05B3/74
Domestic Patent References:
| WO2002089530A1 | 2002-11-07 |
Foreign References:
| JP2008078106A | 2008-04-03 |
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