Title:
SAMPLE HOLDING TOOL
Document Type and Number:
WIPO Patent Application WO/2019/022200
Kind Code:
A1
Abstract:
A sample holding tool 10 according to the present disclosure is provided with: a plate-like insulating substrate 1 which has an upper surface and a lower surface; a heat-generating resistor which is positioned inside or on the lower surface of the insulating substrate 1; a support body 3 which is positioned below the insulating substrate 1, while being at a distance from the insulating substrate 1; and a metal plate 4 which is positioned between the insulating substrate 1 and the support body 3, while being at a distance from the insulating substrate 1 and the support body 3, and which has a lower surface that is affixed to the support body 3 by means of a fixation member 5 so that the upper surface thereof faces the lower surface of the insulating substrate 1. The degree of gloss of the upper surface of the metal plate 4 is higher than the degree of gloss of the lower surface of the metal plate 4.
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Inventors:
SHIOYA KAZUNORI (JP)
Application Number:
PCT/JP2018/028120
Publication Date:
January 31, 2019
Filing Date:
July 26, 2018
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/683; H05B3/00
Foreign References:
| JPH02238619A | 1990-09-20 | |||
| JP2009076689A | 2009-04-09 | |||
| JP2009231401A | 2009-10-08 | |||
| JP2002064133A | 2002-02-28 | |||
| JPH0653145A | 1994-02-25 | |||
| JP2012028428A | 2012-02-09 | |||
| JP2001156014A | 2001-06-08 |
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