Title:
SAMPLE MEASUREMENT RESULT PROCESSING DEVICE, SAMPLE MEASUREMENT RESULT PROCESSING METHOD, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2015/011947
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a device that makes it possible to ascertain the correlation between the state of contamination of a surface of a sample and the electrical characteristics of the sample. The sample measurement result processing device (100) according to the present invention is provided with a first acquisition unit (101) for dividing a surface of a sample into a plurality of measurement positions and acquiring first measurement results for each measurement position in which measurement data for the sample measured using total reflection X-ray fluorescence spectroscopy is associated with the measurement positions, a second acquisition unit (102) for dividing the surface of the sample into a plurality of measurement positions and acquiring second measurement results for each measurement position in which measurement data for the sample measured using thermally stimulated current spectroscopy is associated with the measurement positions, and an integration unit (104) for associating and integrating the acquired first measurement results and the second measurement results using the measurement positions included in the first measurement results and the second measurement results. An example of a sample is a semiconductor wafer.
Inventors:
KONO HIROSHI (JP)
HIRAYAMA TAISEI (JP)
HIRAYAMA TAISEI (JP)
Application Number:
PCT/JP2014/057693
Publication Date:
January 29, 2015
Filing Date:
March 20, 2014
Export Citation:
Assignee:
RIGAKU DENKI CO LTD (JP)
International Classes:
G01N23/223
Foreign References:
| JPH11316201A | 1999-11-16 |
Other References:
YOSHIAKI MATSUSHITA ET AL.: "Zenhansha Keiko X-sen Bunseki (TRXRF", OYO BUTSURI, vol. 60, no. 11, 10 November 1991 (1991-11-10), pages 1141 - 1142
SHIGEYOSHI MAETA ET AL.: "Proposal of The Slope Estimation Method to Evaluate the Energy Depth of Carrier Trap Utilizing A Slope of Thermally Stimulated Current Curve", THE TRANSACTIONS OF THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN A, vol. 111-A, no. 4, 20 April 1991 (1991-04-20), pages 332 - 340
SHIGEYOSHI MAETA ET AL.: "Proposal of The Slope Estimation Method to Evaluate the Energy Depth of Carrier Trap Utilizing A Slope of Thermally Stimulated Current Curve", THE TRANSACTIONS OF THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN A, vol. 111-A, no. 4, 20 April 1991 (1991-04-20), pages 332 - 340
Attorney, Agent or Firm:
YUI Tohru et al. (JP)
Oil well 透 (JP)
Oil well 透 (JP)
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