Title:
SAMPLE PIECE RELOCATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/163042
Kind Code:
A1
Abstract:
This sample piece relocating device (10) comprises an optical interferometry device (11), a sample piece carrying device (13) and a control device (21). The control device (21) controls the sample piece carrying device (13) on the basis of information related to a process in which a charged-particle beam device is used to irradiate a sample (S) with a charged-particle beam, thereby preparing a sample piece. The sample piece carrying device (13) controlled by the control device (21) separates and extracts the sample piece from the sample (S) and holds and carries the sample piece to a sample piece holder.
Inventors:
ASAHATA TATSUYA (JP)
Application Number:
PCT/JP2021/039006
Publication Date:
August 04, 2022
Filing Date:
October 21, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH SCIENCE CORP (JP)
International Classes:
H01L21/66; G01N1/28; G01N1/32
Foreign References:
| JP2001141620A | 2001-05-25 | |||
| JP2010010146A | 2010-01-14 | |||
| JP2009014734A | 2009-01-22 | |||
| JP2006084484A | 2006-03-30 |
Attorney, Agent or Firm:
TAZAKI Akira et al. (JP)
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