Title:
SAMPLE STAGE DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/162325
Kind Code:
A1
Abstract:
A sample stage device (10) is configured such that ideal position information items xtg(i), tg(i) in each predetermined cycle, at which gaps (25, 26) and the like do not affect driving conditions, are calculated and the deviations dx(i), dy(i) between measured positions x(i), y(i) and the ideal position information items xtg(i), tg(i) are obtained in real time in the each predetermined cycle, the measured positions x(i), y(i) being measured in real time by a position detector configured with, for example, laser interferometers (33, 34). In addition, speed command values vx(i), vy(i) such that the measured positions x(i), y(i) track the ideal position information items xtg(i), tg(i), are calculated for motors (27, 28) from the obtained deviations dx(i), dy(i), and a high-speed positioning control of a stable sample table (11) is performed by a feedback control that performs a real-time speed control. This makes it possible to provide a high-speed positioning control system of a stable sample table used in the sample stage device and being capable of suppressing noise due to thermal drift and vibrations without being affected by driving conditions such as, for example, the initial conditions of gaps.
Inventors:
KOBAYASHI Takashi (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
Application Number:
JP2011/064359
Publication Date:
December 29, 2011
Filing Date:
June 23, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
International Classes:
H01J37/20; H01L21/68
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (Kamiya-cho MT Bldg. 19F, 3-20 Toranomon 4-chome, Minato-k, Tokyo 01, 〒1050001, JP)
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Claims: