Title:
SAMPLE STAGE INCLUDING A SLIDER ASSEMBLY
Document Type and Number:
WIPO Patent Application WO2000004304
Kind Code:
A9
Abstract:
A sample stage (12) of a precision sample positioning system (10) includes a sample plate (30) supported above a base plate (26) on a plurality of slider assemblies (200). Each slider assembly (200) includes a base slider (202) secured to a surface of the base plate (26) and a stage slider (204) secured to the sample plate (30). Each slider (202, 204) is made from common material. The common material possesses the characteristic of not having a yield point, and having a sufficiently high strength so as to permit sliding without surface degradation.
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Inventors:
KARAM RAYMOND M II
Application Number:
PCT/US1999/015372
Publication Date:
July 27, 2000
Filing Date:
July 06, 1999
Export Citation:
Assignee:
NANOMOTION INC (US)
International Classes:
F16C29/02; F16C33/12; G02B21/26; (IPC1-7): F16H27/02; F16C33/00
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