A typical raster scanned printing system scans a laser beam along a succession of parallel rows on a workpiece, one row at a time, to form a pixel pattern representing a two-dimensional image. Scanning is done by an oscillating mirror. During one direction of an oscillation a single row is scanned. The mirror is then quickly returned to its original position to begin scanning the next row. An optical encoder may be used to gauge the angular position of the mirror, to aid placing the pixel marks at precise locations along each scan row.

The pixel mark may be formed using an ink coated foil that transfers a spot of ink onto the workpiece in response to receiving laser beam energy at a pixel site.

Summary of the Invention In general, in one aspect, the invention features a technique for marking pixels on workpieces. A beam of radiation is directed along an optical path toward the workpieces. An optical element sweeps the beam along a scan line and a diffractive scan lens focuses the beam at an image plane associated with a surface of the workpiece.

Implementations of the invention may include one or more of the following features. The scan lens has a front surface on which the beam impinges and a back surface, only the front surface is a diffractive surface. The scan lens includes a zero-power substrate. A plane parallel pressure window is located along the optical path between the scan lens and the image plane. The beam

focused by the scan lens is a collimated beam. The beam of radiation is produced by a diode laser. An optical fiber delivers radiation to the optical element. The radiation exiting the fiber optic is collimated by a collimating lens creating the beam of radiation. A fold mirror redirects the beam of radiation.

In general, in another aspect of the invention, a technique for marking pixels on workpieces includes directed a beam of radiation along an optical path toward the workpieces. The beam is scanned (e.g., raster scanned) to define an array of pixel positions. A diffractive scan lens is used to focus the beam along an image plane associated with a surface of the workpiece. Implementations of the invention may include one or more of the following features. The beam is produces with a diode laser. The beam is delivered with an optical fiber. The beam leaving the optical fiber is collimated with a collimating lens.

In general, in another aspect, the invention features a technique for forming a mark on a workpiece.

The workpiece is stationed at a marking station for producing and curing the mark. There is a first optical path from a first radiation source to a position on a workpiece for producing the mark, and a second optical path from a second radiation source to the position on the workpiece for curing the mark.

Implementations of the invention may include one or more of the following features. An optical element sweeps the first and second beams along a scan line for producing multiple marks on the workpiece. A scan lens focuses the first and second beams at an image plane located coincident with the surface. The scan lens has substantially the same focal length for the first beam and the second beam. The scan lens is an achromatic scan lens constructed from two different glasses. The mark is

produced and cured substantially simultaneously. A beam combiner combines the first and second beams. The beam combiner includes a coating for reflecting the first beam and passing the second beam. The first beam is at a wavelength of about 970 to 980 nm. The second beam is at a wavelength of about 670 nm. The first beam is produced by a first diode laser and the second beam is produced by a second diode laser. The mark is produced and cured when the workpiece is in the same position relative to the apparatus. Multiple first and second beams of radiation are directed toward the workpiece to produce multiple marks on the workpiece.

In general, in another aspect, the invention features a technique for determining an angular position of a scanning mirror in a raster scanner. A source of a beam of radiation is aimed to be reflected from the scanning mirror during scanning. A ruled optical element receives the beam of radiation after reflection from the scanning mirror during scanning. The beam moves across rulings on the optical element during scanning. A detector receives the beam after it impinges on the ruled optical element for detecting when the beam moves across successive rulings during scanning. A lens focuses the beam in the vicinity of the ruled optical element, and another lens collects and relays the beam after it has passed through the ruled optical element, the beam being redirected to fall on the detector during scanning.

Implementations of the invention may include one or more of the following features. The lens is positioned between the light source and the scanning mirror such that the beam is focused on an arcuate focal plane. The lens is a single plano-convex glass lens.

In general, in another aspect, the invention features a print head for placing marks on a surface of a workpiece. The ink medium in continuous web form is

associated with an external surface of a compliant- walled, internally pressurized chamber. The chamber wall allows a beam to pass through the chamber wall and strike the continuous web. Implementations of the invention may include one or more of the following features. A structure pulls the continuous web along the chamber wall. The compliant chamber permits the internal pressure in the chamber to be applied against the web as it is pulled along the chamber wall. The compliant-walled chamber comprises polyethylene or polypropylene. The workpiece surface includes an irregular surface and the compliant-wall permits intimate contact of the chamber with the irregular surface. In general, in another aspect, the invention features a technique for printing spots on a surface of a workpiece. Internal pressure is applied to a compliant- walled chamber. A continuous web of ink medium is conformed to a contour of the compliant-walled chamber. A beam is passed within the chamber to strike the continuous web. The workpiece is held with its surface in an orientation to receive spots of ink from the ink medium.

Implementations of the invention may include one or more of the following features. The workpiece surface has an irregular surface and the compliant-wall permits intimate contact of the chamber with the irregular surface. The web is pulled along the compliant-walled chamber, and an internal pressure is applied in the chamber against the web as it is pulled along the compliant-walled chamber.

In general, in another aspect, the invention features a print head for printing spots on a surface of a workpiece. A chamber includes a slot for passage of a laser beam. The ink medium in continuous web form is in

contact with a low-coefficient of friction coating of the chamber such that with the web in contact with the workpiece a seal is formed between the web and the chamber enabling the passage to be pressurized. Implementations of the invention may include one or more of the following features. The workpiece surface includes an irregular surface and the pressurized chamber permits intimate contact of the web with the irregular surface. The web is placed under tension and the web is advanced by friction between the web and the workpiece, the tension being for stripping the web from the workpiece.

In general, in another aspect, the invention features a technique for printing spots on a surface of a workpiece. A continuous web of ink medium is contacted with a low-coefficient of friction coating of a chamber, the chamber including a slot for passage of a laser beam. The workpiece is held with its surface in an orientation to receive spots of ink from the ink medium and to contact the continuous web. Internal pressure is applied to the chamber when the chamber is in contact with the workpiece to form a seal between the chamber and the web. A beam is passed through the passage to strike the continuous web. Implementations of the invention may include one or more of the following features. The web is placed under tension. The web is advanced by friction between the web and the workpiece, the tension strips the web from the workpiece. The workpiece surface has an irregular surface and the pressurized chamber permits intimate contact of the web with the irregular surface.

Advantages of the invention may include one or more of the following.

The invention is capable of producing an n color image by operation at n printing sites on a wide variety

of substrates limited only by mechanical space and timing constraints. Variations are capable of producing process color with some degradation of throughput by overwriting existing scan lines (which would require two or more images with differing pixel parameters and would be slow) . The n colors are realized with only a single laser and optical beam deflection/modulation mechanism, instead of n lasers/modulators, while high process rates are maintained. The use of standard 256 color/indexed color .TIF file formats to define the image pixels has the advantage of permitting a variety of available software packages to be used to create the images. Use of the .TIF palette cells to directly define color/deflection, and amplitude eliminates the software and hardware overhead needed for look up table operations. Because only one byte is fetched per pixel, hardware bandwidth requirements are low and data transfer is very fast. Sixteen level grey scale printing will be possible using appropriate printing foils (coated webs) . The .TIF format tag fields may be used for automatic setup to print a variety of dot densities, scan line lengths and number of scan lines. Images could be printed cis composites of different files. Using a non-rotating data storage medium to pass the image files from the image generation computer to the print control processor cillows a separation of the two functions between an office and a printing location; but also permits them to coexist side by side at the printing location. In some environments it may be useful to isolate the machine operator from access to image generation functions, for quality control.

The scanner encoder which reads directly from a beam reflected from the scanner itself is more accurate, repeatable and linear than analog position sensors (e.g., variable capacitors) . The encoder is also accurate in

the face of a need for extremely high resolution, is generally invulnerable to vibrational modes of the scanner, and is unaffected by shaft flexibilities.

Other advantages and features will become apparent from the following description and from the claims.

Description Figure 1 is a perspective schematic view of a scanned marking system.

Figure 2 is a schematic plan view of fragments of workpieces being marked.

Figure 3 is a schematic side view of a scanner angle encoder.

Figure 4 is a block diagram of control circuitry. Figures 5, 6, 7, and 8, are perspective, side, bottom, and side views, respectively of a print head. Figures 9, 10, and 11 are side views of an alternative print head.

Figure 12 is a side view of an alternative print head. Figures 13 and 14 are diagrams of the motion of a scanning over time for one directional and bi-directional scanning.

Figure 15 is an alternative scanning scheme using a single scanning mirror and scan lens. Figure 16 is a top view of an image on a workpiece.

Figure 17 is an alternative scanning scheme using a diffractive scan lens.

Figures 18, 18a, and 18b are diagrams representing the spot imaged at a focal plane using the scanning scheme of Figure 17.

Figure 19 is an alternative scanning scheme using a fiberoptic coupled laser beam.

Figures 20 and 21 are diagrams representing the spot imaged at a focal plane using the scanning scheme of Figure 19.

Figure 22 is a scanning scheme for simultaneous marking and curing.

Figure 23 is a diagram of an achromatic scan lens for use with the scanning scheme of Figure 22.

Figures 24-24b and 25-25b are diagrams representing the spot imaged at a focal plane using the scanning scheme of Figure 22.

Figures 26 and 26a are side views of an alternative print head.

Figure 26b is a diagram of the pillow of the alternative print head of Figure 26. Figure 27 is a perspective view of an alternative print head.

Figure 27a is a cross-sectional side view of the alternative print head of Figure 27.

Figure 28 is a schematic side view of an alternative scanner angle encoder.

In a scanned marking system 10 (Figure 1) for marking three-color images 12 on the surfaces 14 of a series of integrated circuit packages 16 being stepped along a production line in a direction 20, a laser beam 22 is routed through a series of optical elements and ultimately through a print head 24 where it strikes print foils 25 to apply ink to the surfaces. (In Figure 1, for clarity, the packages 16 are shown at a distance below the print head. During actual printing, the bottom of the print head is adjacent to, and the foil contacts, the surfaces of the packages.)

Laser beam 22 is a beam supplied from a relatively inexpensive 25 watt C0 ₂ laser 26. Beam 22 has a diameter of about 3 mm. In a beam splitter 28, the beam is

divided into two beams at right angles to one another. One beam 30 is delivered to a power meter 32 which detects the power in the beam and delivers an output signal in a feedback loop to control operating parameters to keep the output power of the laser at a desired level (e.g., 25 watts). The second beam 34 is reflected at a right angle by a plane mirror and delivered through an acousto-optical deflector 38. The deflector is spaced along the optical axis of the system at a sufficient distance from the laser not to be within its near field (e.g., 8") . The deflector is capable of allowing the beam to pass through along direction 40, and of redirecting (switching) a portion of the beam to any one of at least three predetermined new directions 42, 44, 46 at high speed under control of a deflection input signal 48. The deflector is also capable of altering the amplitude of energy delivered by the beam by controlling what fraction of the beam is redirected in response to an amplitude signal 49. Although the figure shows three simultaneous output beams 42, 44, 46 for clarity, in operation there is a single beam which may be switched among the three paths shown.

When the beam passes in the unswitched direction 40, it strikes a beam stop 53; this is done when the deflection input signal 48 indicates that no pixel is to be marked. Switching the beam to any of the other directions 42, 44, 46 causes it to form a mark at a pixel location on a selected one of three of the integrated circuit packages located at one of three printing stations defined by the print head.

All paths leading from the deflector pass through a long focal length plano-convex lens 50. When the beam is directed along path 42, 44, or 46, lens 50 serves to focus the beam as a small spot on a corresponding one of

three convex mirrors 52, 54, 56 at a distance of about 30" from lens 50.

The three mirrors are configured and mounted so that they respectively reflect the beam along one of three slightly divergent paths 58, 60, 62 causing it to strike a corresponding one of three concave mirrors 64, 66, 68. The convexity of each of the mirrors 52, 54, 56 causes the beam to diverge as it passes to the corresponding one of the mirrors 64, 66, 68. Mirrors 64, 66, 68 collimate the beam to a diameter of about one inch and direct the beam to a corresponding one of three planar mirror sections 70, 72, 74 of an oscillating machined aluminum scanner 76. Scanner 76 is driven to swing back and forth about an axis of a shaft by a brushless DC motor 78 operated so as to simulate a galvanometer scanner and controlled by a signal 80.

Each of the scanning mirror sections reflects the beam through a corresponding one of three focusing lenses 82, 84, 86 and into a corresponding one of three printing sections of print head 24. Each lens 82, 84, 86 is a flat field scanning lens. Lenses 82, 84, and 86 are custom designed for use at the wavelength of a C0 ₂ laser.

Other lasers could be used, for example, a YAG laser or a HeNe laser. Three-Color Marking

In a finished image 90 (Figure 2) marked by the system shown in Figure 1, each pixel location may have any one of three colors (A, B, or C) or may have no color. The pixels which are to be in color A are printed at station I, the pixels which are to be in color B are printed at Station II, and the pixels which are to be in color C are printed at station III. During printing, all three stations may be occupied simultaneously by surfaces to be printed. The printing of pixels at the three stations is interleaved.

O 97/22944 PC17US96/18648

- 11 -

A complete marking cycle for printing a full-color image on a surface includes three subcycles in which the surface successively occupies positions at the three stations I, II, and III. For example, in a first subcycle a surface 92 receives color A at station I (in the form of a partial print corresponding to color A) , while a second surface 94 receives a color B at station II (in the form of a partial print corresponding to color B) , and a third surface 96 receives color C at station III (a partial print for color C) . In the second subcycle, surface 92 receives color B at station II, and so on. At the end of one complete marking cycle, one surface is fully printed with the three partial prints making a complete print 90, a second surface has two colors printed, and a third surface has one color printed.

Interleaved (parsed) printing of the three colors is achieved by control of the acousto-optic deflector. The scanning mirror causes scanning of the laser beam along a conceptual row of image pixels, e.g., row 1, beginning at the top of the Figure and progressing to the bottom. Each pixel of conceptual row 1 actually has three possible incarnations as a partial print pixel lying along one of the three rows—row 1(1), row 1(11), and row l(III)—at the three stations. As the scanned beam reaches any of the columns (pixel positions) along the row, the acousto-optic deflector is capable of directing the beam to any one of the three stations so that the corresponding partial print pixel on that row may be printed. For example, pixels 102 through 114 are printed one after the other in the course of scanning row 1. The progress of the printing represented in Figure 2 is the completion of only row 1. Also, in Figure 2, for clarity, only fragments of the surfaces being printed are shown and they are spaced closer than would be possible

in the actual system. Surface 98 shows all of the printed pixels of the image fragment. Alternative Optical Conficmrations

In an alternative scheme, focusing lenses 88, 90, 92 are diffractive scan lenses. Referring to Figure 17, in this scheme, collimated input light 808 at 10.6 microns incident at a fixed angle on scanning mirror 70 is reflected by mirror 70 and the still collimated light strikes a diffractive surface 812 of a diffractive scan lens 810 (available from OFC-Diamond Turning Division, Keene, NH) (only one of the three lenses used in system 10 being shown) . Diffractive surface 812 focuses the light through a zero-power substrate 814 of scan lens 810 and through a ZnSe plane-parallel pressure window 818 (available from II-VI Inc. , Saxonburg, PA) to an image plane 820. Pressure window 818 provides a seal between the optics and the foil in a print head to allow for positive air pressure against the foil. The foil tension can then be adjusted for optimum ink transfer from the foil when printing. Scanning mirror 70 is nominally oriented at 45° (position 809) to the incoming light. After reflection, the light is directed at 90° to the incoming light and parallel to the optical axis of diffractive scan lens 810 and is focused by diffractive scan lens 810 at a spot 822 in image plan 820.

At other angular positions of scanning mirror 70 (four positions 824, 826, 828, 830 being shown in Figure 17) , the reflected light is incident on scan lens 810 off the optical axis. These positions give rise to off-axis beams and image plane spots 832, 834, 836, 838, respectively.

Each beam is focused to a field point in the image plane whose position is given by y = F _X Θ; where y is the off-axis distance, F _χ is the scan lens focal length and θ

is twice the angular deviation of scanning mirror 70 from its nominal 45° orientation.

The single element diffraction scan lens 810 thus yields a scanned image on a flat field with the position of the image point linearly proportional to the angle of scanning mirror 70. The geometrical spot shapes and sizes on-axis 840, 9.45° off-axis 841, and 13.5° off-axis 842 are shown in Figure 18. The fractional energy as a function of spot radius is shown in Figure 18a. As can be seen in the Figures, diffractive scan lens 810 produces uniform diffraction limited spot profiles across the scanned image. Figure 18b shows the effect of focus shift on the geometrical spot size for on-axis 843, 9.45° off-axis 844, and 13.5° off-axis 845 spots. A negative shift is in the direction of arrow 846 (Figure 17) and a positive shift is in the direction of arrow 847.

Advantages of the single diffraction scan lens over methods using a series of conventional ground and polished spherical lenses include less fabrication and alignment, a smaller, lightweight structure and better spot uniformity.

An additional alternative scheme is shown in Figure 19. Here, the light source (not shown) is a diode laser at a wavelength between 970 and 980 nm. The diode laser is about 4-5 times more efficient than C0 ₂ and YAG lasers. The light is delivered by a 0.40 numerical aperture circular fiber optic cable 850. The light diverges from cable 850 and is collected and collimated by a single, molded, glass aspheric lens 852 (available from Geltech, Alachua, FL) to a diameter of approximately 5.0 mm. This collimated light is incident on scanning mirror 70 at a fixed angle. Scanning mirror 70 rotates causing the collimated beam to scan in an angular fashion about the pupil of a focusing lens 854 (available from Opticraft, Woburn, MA) . The focusing lens 854 intercepts

the collimated beam and forms focused spots in the focal plane or image plane 820 via mirror 856. Scanning mirror 70 is aligned with the pupil of scan lens 854 to avoid vignetting and pupil shifting. The diode laser source is modulated by switching the diode drive current to a desired power level just below threshold. In this way, a dot is formed at the scan lens focus whenever the diode source is turned on. A fold mirror 856 is shown between scan lens 854 and focal plane 820. Fold mirror 856 is employed when optics 852, 70, and 854 are mounted in a horizontal plane and the print beam is deflected down onto the top of the part to be printed.

The geometrical spot shapes and sizes on-axis 858, 9.45° off-axis 859, and 13.5° off-axis 860 are shown in Figure 20. Minor amounts of spherical aberration and astigmatism are present off-axis but the spot diagrams are still well within the desired diffraction limit for 500 dots per inch printing. Figure 21 shows the relative irradiance along two superimposed orthogonal axes (x, y) for on-axis 861, 9.45° off-axis 862, and 13.5° off-axis 863. As can be seen, most of the energy is concentrated within the required 50 micron (0.002") diameter needed for 500 dots per inch printing. The irradiance profiles of Fig. 21 representing the spot profiles are only very slightly dependent on the distributions shown in Fig. 20. This is because the system is diffraction limited such that the geometrical errors, as shown in Fig. 20, are very small. Advantages of this system include direct modulation of the diode laser source requiring no external modulators and auxiliary optics; air cooling of the diode laser source requiring no closed loop water chillers; a small compact size permitting a print head/engine that fits easily into a small package, is

lightweight and easily translatable; a simple optical system for scanning and beam delivery since the diode laser wavelength allows for a high F/no. reducing the requirements on the scan lens, permits inexpensive and ordinary glass materials to be used for the optics, and produces high optical efficiency since the glass optics are essentially non-absorbing in the near IR wavelengths.

The near infrared wavelength of the diode print beam of Figure 19 is close enough to the visible region that an optical system can be designed that delivers print energy at a near IR wavelength and cure energy at a visible wavelength simultaneously to the foil.

Referring to Figure 22, collimated print light 88, e.g., from cable 850 as described above with respect to Figure 19 or directly coupled from collimating optics, and collimated cure light 880, e.g., visible red light at 670 nm generated from a diode laser source that is either coupled directly to collimating optics or fed by a fiber optic cable, are combined by a dichroic beam combiner 882. Beam combiner 882 has a dielectric bandpass filter coating designed to reflect nearly 100% of light at wavelengths above 800 nm while transmitting those below 800 nm. The 975 nm print beam is reflected from beam combiner 882 to 90° from its incoming angle while the collimated red cure light passes through. Both collimated beams 884 are now collinear and superimposed. Both beams 884 are then reflected off scanning mirror 70. Rotation of scanning mirror 70 causes collimated beams 884 to scan in an angular fashion about the pupil of an achromatic scan lens 886 (available from Opticraft) . The scan lens intercepts the collimated beam 884 and forms focused spots 888 in the focal plane or image plane 820. A fold mirror 856 is shown between scan lens 886 and focal plane 820.

Focusing lens 886 has the same focal length for wavelengths between 970 and 980 nm and for 670 nm ensuring that both light beams will focus in the same longitudinal and transverse planes. The cure light is superimposed on the printed dot at essentially the same time and instantly cures the ink as soon as the ink is melted.

Referring to Figure 23, achromatic scan lens 886 is fabricated from two different glasses 890, 891 to achieve achromatization. Glass 890 has positive power and is, for example, SK16, a crown glass having high dispersion. Glass 891 has negative power and is, for example, SF6, a flint glass having low dispersion. The combination of the positive and negative powers coupled with the different dispersions produces an achromatic lens 886 having the desired power, and thus focal length, and essentially no dispersion at the selected wavelengths. The two glasses (available from OptiCraft) are cemented together which has the advantage of low fabrication costs and ease of alignment. The lens includes one plane surface 892. The two glasses are of common material and easily worked.

The geometrical spot shapes and sizes for marking on-axis 893, 9.45° off-axis 894, and 13.5° off-axis 895, and for curing on-axis 893a, 9.45° off-axis 894a, and 13.5° off-axis 895a, are shown in Figure 24 and the fractional energy as a function of spot size radius for marking is shown in Figure 24a. The cure light spot is contained completely within the 50 micron diameter of the print spot across the scan plane.

Figure 24b shows the effect of focus shift on the geometrical spot size for on-axis 896, 9.45° off-axis 897, and 13.5° off-axis 898. A negative shift is in the direction of arrow 899 (Figure 23) and a positive shift is in the direction of arrow 899b.

Minor amounts of spherical aberration and astigmatism are present off-axis but the spot diagrams are still well within the desired diffraction limit for 500 dots per inch printing. Figures 25-25b show the relative irradiance along the radius of spot diameter for on-axis 893, 893a, 9.45° off-axis 894, 894a, and 13.5° off-axis 895, 895a. As can be seen, most of the energy is concentrated within the required 50 micron (0.002") diameter needed for 500 dots per inch printing. An advantage of the print/cure system is its small, compact size and efficiency. Additionally, the curing process does not add extra time to the printing process. Scanner Angular Position Encoder To assure that the pixels marked along each scan line on the workpiece are evenly spaced and accurately positioned, a low power (1 to 3 milliwatts) secondary laser (HeNe or diode laser, preferably visible) beam 510 (Figure 3) is reflected from the flat mirror surface of the middle mirror element 72 of the scanning mirror

(Figure l; but for clarity the position encoder is not shown in Figure 1) . Another mirror surface (for example, one at a different angle) dedicated to use by the encoder could be used instead. As the scanning mirror swings 512 (through an angular range of + or - 3.183 degrees on either side of a central angular position) to reach successive pixel locations along the scan line, a focused version 514 of the beam scans back and forth 516 across successive parallel rulings 518 formed on a transparent substrate

520 (also shown head on at the top of Figure 3) , and is then projected onto a wide aperture (0.250 inches diameter) light detector 524.

The widths of the rulings compared to the diameter of the focused reflected beam are appropriate to assure

that the detector output signal 526 will indicate when each line is passed. The number of rulings is at least as large as the number of pixels to be placed along a scan line and their spacing is representative of the spacing of the pixels along the scan line. During setup, the position of the ruling substrate is set so that at the moment when the focused reflected beam crosses the first ruling, the first dot position on the scan line on the workpiece is reached. During scanning, output signal 526 provides an indication for each ruling that is crossed. The output signal 526 is fed to the DMA controller portion 610 of processor 120. When each pixel position is reached, signal 526 causes the DMA controller to fetch an associated image byte which determines whether marking is to occur at that pixel site; if so it signals the deflector to direct the pixel to be printed at the desired surface (color) 92, or 94, or 96 (Figure 2) . In this way, the marking of dots along the scan line is triggered simply and accurately based on a light beam reflected from the same surface (or at least a mirror surface fabricated on or affixed to the same structure) which reflects the marking beam.

In Figure 3, beam 510 is originated from a He-Ne laser 530. Its output beam 532 is routed through a beam expander 534 and a collimating lens 536. The resulting beam has about a 1/2-inch spot size and is then reflected from a plane right angle mirror 538 onto the scanning mirror. The reflected beam from the scanning mirror is passed through a focusing lens 540 which focuses it on the ruling substrate. The beam that emanates from the ruling substrate is defocused and aimed at the detector by a lens 542. As indicated in dashed line, when the scanner is at the upper end of its stroke beam 14 is aimed near the top of the ruling substrate. As the

scanner sweeps through its full range, beam 14 is swept across the ruling substrate. Lens 542 redirects and diffuses the beam in such a way that a single wide aperture detector continues to receive the beam as the scanning mirror is swept through its full range.

An alternative implementation of the position encoder is shown in Figure 28. A collimated beam of light 940 at 635 nm from a diode laser 942 is incident on-axis to a single plano-convex glass lens 944. Lens 944 focuses the light towards a focal point along a plane 946. Scanning mirror 70 intercepts the light between lens 944 and focal plane 946 forcing the focused spot to sweep out an arc along focal plane 946 with a radius equal to the distance between scanning mirror 70 and focal plane 946. The position of the focused spot along focal plane 946 is linear and given by the product of sweep angle and sweep distance. A curved ruling 948 (available from Phototool Engineering, Inc. , Chelmsford, MA) is placed along focal plane 946 producing a linear scan of the spot corresponding to the position of scanning mirror 70. Light passing through ruling 948 is relayed to photodetector 524 by a relay lens pair 950. Lens pair 950 reimages the light onto the photodetector such that vignetting and thus signal variations during scan are avoided.

Advantages of the encoder include providing a linear scan regardless of whether the mirror rotation is linear. The encoder measures the mirror rotation directly and accurately. There is no ambiguity over errors caused by methods involving indirect measurement.

It is also fast and measures the motion in real time. The focusing lens is used on-axis only so an inexpensive, readably available lens can be used. There is nothing placed between the scanning mirror and the ruling to

corrupt the light path and therefore the motion of the focused spot on the curved ruling is perfectly linear. Controller (Processor)

The coordination of the elements of the system is performed by a controller (processor) 120 (Figure 4) . An image file 122 stored in RAM contains information sufficient to specify the colors and intensities of each of the pixels in the image to be marked. The computer controls a stage driver 124 to cause motion of a stage 129 on which the workpieces are mounted. The stage 129 is controlled both to cause large motion to relocate the workpieces at the successive printing stations after each marking sub-cycle, and finer scanning motion to move the workpieces row by row during marking. (Alternatively, the print head containing the scanning mirror and other downstream optics can be scanned along a stationary workpiece.) The controller also controls the scanner driver 79 to cause the scanner to swing back and forth along each of the rows of the image. By coordinating the stage driver and the scanner driver, the controller is able to cause the laser beam to raster scan all of the pixels of the image. By also controlling the acousto- optical deflector 38, the controller is able to parse the image pixels into partial prints by directing the beam to any of the three printing stations or to no station in order to print at each pixel the intended color or no color, as indicated in the image file.

The first pixel of a scan line is marked on a workpiece at the time when the scanner causes the measuring beam to reach the first ruling on the substrate. In the case of a 300-by-300 pixel image, when the 300th ruling is crossed by the measuring beam, the controller triggers the scanning mirror to reverse its motion and re-position itself to begin the next scan line. When the 300th scan line is completed, ending a

marking subcycle, the controller halts the scanning process, re-positions the workpieces at their new stations and restarts the scanning.

Image file 122 is a .TIF format file and is held in a form of RAM for use during marking. The RAM may be an EPROM or SRAM (e.g., PCMCIA card) or other fast access memory, i.e., flash or D-RAM. The .TIF file data is arranged to represent the color and intensity to be marked at each pixel in the 300-by-300 pixel image field. The encoder signal 526 is routed to the DMA circuitry 610 of the control processor. As the signal indicates the arrival of the encoder beam at each successive pixel location along the scan line, the DMA circuitry causes a direct memory access of the pixel color (deflection of the beam) and intensity from the RAM. The DMA channel contains its own addressing circuitry and may run independently of any CPU involvement except for the initial setting of the channel's control words. During the encoder's deadband time, the CPU sets up the DMA control words to start on the first encoder transition signal 526. By deadband we mean the time beginning when the scanned beam, during its retrace, just passes the first ruling and ending when, at the beginning of the next forward trace, the scanned beam just reaches the first ruling. At the beginning of a new scan, the encoder transition is deglitched to insure validity and then triggers a DMA request to transfer the first image byte from EPROM or PCMCIA memory into dual D/A converters 614, 616. The high order four bits of the byte (the deflection information) are sent to one D/A converter and the low order four bits (the amplitude information) are sent to the other D/A converter. The outputs 48, 49 of the two D/A converters are respectively fed to the deflection and amplitude ports of the acousto-optical deflector 38.

Each encoder transition signal 526 resets a predetermined CPU timer value. When the timer expires, the D/A amplitude channel is reset. This in effect controls the pixel "on time" or dwell. The DMA channel expects to receive the appropriate number of transitions for each scan line. Upon detecting the last pixel in the scan line the channel automatically shuts down and waits until its control word is reinitialized for the next scan line after scanner retrace. The .TIF file contains 8-bit pixel values each of which is capable of specifying 256 colors. The .TIF file is generated by, e.g., Photo Finish (a software package available from ZSoft Corp, of Marietta, Georgia which runs under Microsoft Windows) . The file's tag fields contain the necessary information defining the image's pixel density (dots/inch) , and line and column sizes. The image file is uncompressed and presented to the marking control computer on the EPROM or PCMCIA memory card. A palette is defined for use in encoding pixels in the .TIF format. The standard .TIF palette is a 16-by-16 matrix; each entry in the matrix is a pointer to a color value in a color table. This arrangement is modified for use in driving the scanned marking system. Photo Finish offers the user the capability of editing the color palette. Here the color palette is edited to include all blank cells except for four cells. One of the non-blank cells is used to represent nonprinted color, and the other three to represent print colors. For example, if the three print colors are red, white, and blue, the palette would be configured to represent the non-print color (black) by cell 00 (hexadecimal) , red by cell 3f (hexadecimal) , blue by cell 9f (hexadecimal) , and white by cell ff (hexadecimal) . No other cells would be used. The eight-bit value in each of the four cells is

specially encoded. The high order four bits of the value is used to determine deflection information. The lower order four bits represent amplitude and control the amount of laser energy delivered, or may be used to print the desired color in grey scale by using an ink medium which is sensitive to grey scale information and an associated grey-scale image file and palette.

The control processor 120 (an Intel 80188) also controls airvalves and AC power 525, servo and stepper motors 527, and a touch screen display 529 for production worker interaction.

Marking begins when the CPU starts the laser scanner. All marking functions are slaved to the laser scanner cycle (approximately 90 Hz) . Some dummy scans are performed to stabilize the scanner before marking scans are performed. There are two rules which should not be violated. One rule is that at least the same number of encoder transitions as pixels per scan must be received (this may require mechanical adjustment) . The second is that the encoder must be in the deadband at a specified time, i.e., with no encoder transitions occurring during the deadband. Print head

Referring to Figures 5 and 6, in one version of a print head 400 for each print station, the foil 402 is delivered from a supply roll 404 with the ink side down and pulled against a parabolic surface 406 of a hollow pressurized chamber 407 by an idler roller 408. Tension is provided by applying a torque to the hub of supply roll 404. The foil then is drawn over and conforms in contour to the parabolic surface, eventually reaching a pair of outfeed tension rollers 410, 412, and from there a take up roll (not shown) . As the workpiece 415 to be marked is moved in the direction 416 during scanning, the foil is fed in direction 417 at the same or nearly the

same velocity as the workpiece. Using a slightly different velocity has the advantage of setting up small shear forces at the interface between the foil and the part, which may improve the print quality. As seen in Figure 7, the apex of the parabolic surface of the print head has an aperture 420 which extends across the print head leaving parabolically contoured bordering sections 422, 424, which maintain the contour of the foil.

As seen in Figure 8, when the leading edge of workpiece 415 reaches the foil it causes the foil to contact the top surface of the workpiece along a small region 426 which runs linearly across the print head (into the page). At the same time, air pressure from within the hollow print head chamber presses the foil against the part. Tension on the foil (imparted by the supply roll) balances the force exerted by the air pressure. The air pressure in the head may be at any level up to the equivalent pressure provided by the tension of the foil over the curved head. As the workpiece moves along to the left, the limited linear contact area 426 moves across the top surface, with the foil being peeled away shortly after it first makes contact with the surface. The laser marking occurs along the scan line along the linear contact line between the foil and the top surface.

There is a controlled time between the scanning of a line and the stripping of the foil from the workpiece along that line, and the contact time is constant for all scan lines. This improves the uniformity of the printing. Because the foil is stripped continuously at a relatively narrow strip line, the peak strip force is reduced and the workpiece does not need to be held. Because the area of contact between the foil and the workpiece is small, the amount of force required to hold

the foil against the workpiece is small. No metal parts contact the workpiece; only the foil does.

This version also has disadvantages. The head must extend below the surface of the workpiece on either side, which makes it difficult to print workpieces held in trays. The scheme requires uniformity of workpiece height because the vertical interference (429 in Figure 8) between the workpiece and the foil is on the order of only .005 inches to .020 inches. One possible solution to this disadvantage would be to make the head the same width as the workpiece but form the head of compressible rubber. With multiple printing stations of different colors, the routing of the foils to avoid interference with one another also must be addressed. Referring to Figures 9, 10, and 11, in an alternative print head 430, foil 432 is fed over a contoured edge 434 of a wall 436 of a hollow pressurized (0.5 to 5.0 psi) chamber 438, past a rubber sealing flap 440, past a foil guide 442, across an opening 444 which is broad enough to span the entire image, past a second foil guide 446, a second rubber flap 448, and a second contoured edge 450. Opening 444 is defined in a window 449 which has two contoured surfaces 445, 447 that support the foil. Prior to workpiece 452 being moved into contact with foil 432, the portion of the foil the spans the opening 444 has a convex curved contour formed in it by the internal air pressure in the head. As the workpiece is moved toward the head, the first contact is made at the center point 454, and the area of contact then spreads outward. This helps to prevent the capture of any air bubbles between the workpiece and the foil which could degrade the print quality. Once the foil is in full contact with the upper surface of the workpiece (Figure 10) , the entire image is scanned. Because the workpiece is being moved in direction 460 to reach

successive scan lines, the head must also be moved at the same velocity. Alternatively, two dimensional laser beam scanning may be used.

After the image has been fully scanned, the foil is stripped from the workpiece all at once (Figure 11) by pulling the head away from the workpiece. As shown the window may be moved away from the head to aid the stripping. Then the foil is advanced to expose a new ink area for use in printing the next workpiece. A third alternative print head. Figure 12, is a simplified version of the second alternative. Pressurized chamber 470 has a top window 472. A rubber pad 474 in the shape of a window frame is attached at the bottom of the chamber. Foil 476 is stretched across the rubber window. Only minimal pressure may be achieved against the foil before the workpiece is moved into contact because air escapes at both edges of the rubber window. But the minimal pressure which may be achieved causes the foil to curve downward lightly at its center 478. Once the foil is pressed against the rubber window, the pressurization inside the head provides a substantial force to hold the foil against the surface of the workpiece. The third alternative is simpler than the second, the foil is easier to load, and there is less chance of damage to the foil surface. But the workpiece must be able to be pulled from the foil, as there is no movable window to aid that process, more force must be applied to the workpiece, and bubbles may not be as easily eliminated. The laser beam is delivered via a lens or window on top of the print head and passes through the hollow chamber to reach the foil.

An alternative print head design enables printing of irregular workpiece surfaces. Referring to Figs. 26- 26b, an air inflated polyethylene or polypropylene

chamber, e.g., pillow 900, is inflated to a predetermined pressure (generally less than 10 psi but dependent on the size of the pillow and the application) and sealed to prevent the pressure from escaping. Pillow 900 is sealed such that pillow clamp flaps 905 extending from pillow 900 are produced. Clamp flaps 905 permit attachment of the pillow to the print head 902 of the laser transfer device with clamp 907. The size of the pillow is only limited by the scan capabilities of the associated laser optics.

During use (Figure 26a) print head 902 exerts a downward force 904 of the pillow on the part 906 to be printed. Pillow 900 presses print foil 908 against the part 906 over the entire print surface. The internal pressure of the pillow, combined with the compliance of the thin gage polyethylene/polypropylene material of the pillow, creates an intimate contact between foil 908 and part 906. The laser scans the entire printed image through the non-opaque material of the pillow, transferring the ink to the printed part.

Pillow 900 allows for printing on irregular surfaces without losing intimate contact of the ink/carrier and the printed part.

Referring to Figures 27-27a, here a print head 920 which also permits printing of irregular workpiece surfaces includes a rubber pad 922 approximately 0.05 inch wide 940 surrounding an opening 924 approximately 0.100 inch wide 942. The length 944 of opening 924 is typically 0.25 to 2.0 inches. The rubber pad is mounted to a rigid support 926 of, for example, aluminum, having a corresponding slot shaped opening to that of opening 924. Through these slots is scanned a laser beam for the laser thermal transfer printing. The outer surface 928 of rubber pad 922 is made slippery, such as by covering

with a Teflon® film. The desired coefficient of friction of outer surface 928 is generally less than 0.250.

Rubber pad 922 presses foil 908 against part 906. Foil 908 slides along film 928 exposing an area of foil 908 to printing. As used foil 930 emerges from edge 932 of the pad 922, tension 934 in the foil is used to strip (pull away) the foil from the part. The internal slot opening is pressurized via a connection to a regulated air pressure source (not shown) to maintain the required intimate contact between the foil and the part. Foil motion is provided by the coefficient of friction between the foil and the part being higher than the coefficient of friction between the foil and the slippery surface 928 of the rubber pad. The foil then moves (is pulled along) with the relative motion of the part. The pressure of part 906 on rubber pad 922 produces the seal between foil 908 and pillow 920. Head pressure can therefore be used as an indication of whether there is a part in place to be printed. Advantages of print head 920 include the ability to maintain a seal to a part when the part is located in a recess, and the replacement of an active drive with the friction foil drive produced by the relative motion of the part past the print head. Optimized Raster Scanning

Although the marking of a scan line of the image is typically done only during oscillation of the scanning mirror in only one direction, and no marking is done during the reverse scan or retrace, an alternative scheme performs marking of one line of a print of a given scan line on one workpiece during one direction of oscillation and another line of a print of the given scan line on a second workpiece during the return oscillation. In the example of Figure 1, two identical monochrome images, for example, could be simultaneously marked on two surfaces

at two of the printing stations by directing the scanned beam to one station during one direction of scanning and directing the scanned beam to the other printing station during the reverse direction of scanning. This allows essentially two images to be created in almost the same time that it would take to mark a single image in one direction scan marking.

Referring to Figure 13, in one directional scanning, scanning occurs during a period 702 of relatively gradual motion 703. Scanning time is wasted during a period 704 of relatively rapid retrace motion 705. The percentage of wasted time may be on the order of 33%.

In Figure 14, with two-directional scanning, the return scan motion 707 is symmetrical with the forward scan motion 709. The percentage of wasted time 708 is considerably less, largely because the retrace time is not wasted, but also because the wasted time 708 is somewhat shorter. It is shorter because change in velocity between forward and return scans is reduced, allowing a greater portion of each scan to be used, and a smaller portion to be wasted.

Both forward and return scans in theory could be used to paint a single print more rapidly, but that would produce a zig zag appearance of the scan lines as the workpiece is moved along during scanning. Parsing the forward and return scans between two marking stations precludes the zig-zag effect while retaining the speed advantage. Referring to Figure 15, in an alternative scanning scheme for use with a YAG laser 720, a single flat scanner mirror 500 and a single f _Theta l ^{ens 502 are} used to feed the beam to the three printing stations. The three mirrors 64, 66, 68, all direct the beam to the single scanner mirror 500 which is driven by a galvo 503.

In this scheme, there is a single long printhead 512 for all three marking stations and the three workpieces 506, 508, 510 are moved in parallel for successive scan lines. The staging must then move each workpiece in a perpendicular direction after each partial print is finished in order to position it at the next marking station. Three foils 514, 516, 518 are also moved in parallel.

Other embodiments are within the scope of the following claims.

A wide spectrum of marking modes may be achieved because the system provides the ability to mark any pixel of an image at any one of several marking stations in each of several marking sub-cycles within a marking cycle and in each of the successive marking cycles. The printing of identical monochrome images on two workpieces and the printing of color images at three workstations (described above) are but two of possibilities. Other possibilities include the following. More than three marking stations may be provided, offering the possibility of more than three colors in an image.

In a high mix mode production line, it would be possible to frequently change what is being printed on the workpieces being stepped along the line. For example, a chip manufacturer could "private label" chips in groups as small as a few each. Once the first batch, bearing the first logo image passes completely through the marking stations, a new logo image could be loaded into memory and the chips in the next group marked, and so on.

Serialization of the workpieces could be achieved by providing a window 802 in an image 804 for inclusion of the serial number 806 (Figure 16) . After each marking cycle, a subimage containing the new serial number is

inserted into an image buffer at the location of the window for printing the next workpiece. In the case of three station printing, the third station could be the location where the serial number is printed. The partial prints at the first two stations would have non-printed windows to leave space for the serial number to be added at the third station. The main parts of the image and the serial number could be of different resolutions.

In some implementations a bar code reader could scan a unit/lot traveler record and automatically download an appropriate image for that unit or lot from a network server.

In another example, a global memory could serve as the image transfer medium between the image generation software and the machine control processor in a Windows NT environment.

A wide variety of workpieces and surfaces may be marked.

There may be more or fewer than three marking stations.

Marking could be done by ablation of the surfaces without use of inks.

Other information may be found in United States Patent Application Serial Number 08/149,285, incorporated by reference.

What is claimed is: