SCANNER AND SCANNING PROBE MICROSCOPE

WIPO Patent Application WO/2018/131343

A1

Provided is a scanner that enables wide-range measurements as well as high-accuracy and high-speed measurement. Provided is a scanner comprising: an outer frame; a first inner frame that is disposed inside the outer frame; a wide-area Y actuator that moves the first inner frame in relative fashion in a Y direction with respect to the outer frame; a second inner frame that is disposed inside the first inner frame; a wide-area X actuator that moves the second inner frame in relative fashion in an X direction, which is orthogonal to the Y direction, with respect to the first inner frame; a third inner frame that is disposed inside the second inner frame; a narrow-area Y actuator that moves the third inner frame in relative fashion in the Y direction with respect to the second inner frame; a movable base that is disposed inside the third inner frame; and a narrow-area X actuator that moves the movable base in relative fashion in the X direction with respect to the third inner frame.

YAMASHITA HAYATO (JP)
ABE MASAYUKI (JP)

PCT/JP2017/044060

July 19, 2018

December 07, 2017

Click for automatic bibliography generation  

UNIV OSAKA (JP)

G01Q10/04; G01Q10/02

WO2012035826A1	2012-03-22
WO2010087114A1	2010-08-05
WO2006129561A1	2006-12-07

JP2007218677A	2007-08-30
JP2010190657A	2010-09-02
JP2005190228A	2005-07-14
JPH07128467A	1995-05-19
JP2002082036A	2002-03-22
JP2007171022A	2007-07-05
JP2005164278A	2005-06-23
JP2003247929A	2003-09-05
JP2001305036A	2001-10-31

See also references of EP 3570045A4
T. ANDO ET AL., E-J. SURF. SCI . NANOTECH., vol. 3, 2005, pages 384

ORISAKA Shigeki (JP)

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