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Title:
SCANNING ANTENNA AND METHOD FOR PRODUCING SCANNING ANTENNA
Document Type and Number:
WIPO Patent Application WO/2019/031392
Kind Code:
A1
Abstract:
This method for producing a scanning antenna produces a scanning antenna in which a plurality of antenna units are arranged, and which comprises: a TFT substrate that comprises a first dielectric substrate, a TFT, a gate bus line, a source bus line and a plurality of patch electrodes; a slot substrate that comprises a second dielectric substrate (51) and a slot electrode (55) having a plurality of slots (57) that are arranged so as to correspond to the plurality of patch electrodes; a liquid crystal layer; and a reflective conductive plate. This method for producing a scanning antenna comprises: a step (a) wherein a first conductive film (55a') containing copper is deposited on a first main surface of the second dielectric substrate; a step (b) wherein an oxide film (55o') is formed in the surface of the first conductive film by bringing the first conductive film into contact with the atmosphere after the step (a); and a step (c) wherein a second conductive film (55b') containing copper is deposited on the oxide film after the step (b).

Inventors:
MISAKI Katsunori
Application Number:
JP2018/029107
Publication Date:
February 14, 2019
Filing Date:
August 02, 2018
Export Citation:
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Assignee:
SHARP KABUSHIKI KAISHA (1 Takumi-cho, Sakai-ku Sakai Cit, Osaka 22, 〒5908522, JP)
International Classes:
H01P11/00; H01Q3/34; H01Q3/44; H01Q13/22; H01Q21/06; H05K1/09; H05K1/16
Domestic Patent References:
WO2017061526A12017-04-13
WO2017011567A22017-01-19
Attorney, Agent or Firm:
OKUDA Seiji (OKUDA & ASSOCIATES, 10th Floor Osaka Securities Exchange Bldg., 8-16, Kitahama 1-chome, Chuo-ku, Osaka-sh, Osaka 41, 〒5410041, JP)
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