SCANNING ELECTRON MICROSCOPE HAVING DETACHABLE COLUMN, AND IMAGE ACQUISITION METHOD USING SAME

Title:

SCANNING ELECTRON MICROSCOPE HAVING DETACHABLE COLUMN, AND IMAGE ACQUISITION METHOD USING SAME

Document Type and Number:

WIPO Patent Application WO/2020/197099

Kind Code:

A2

Abstract:

A scanning electron microscope according to the present invention enables a column to be detached from a sample installation unit, thereby addressing issues related to the column, such as simple calibration related to the column, misalignment of a beam, replacement of consumables, etc., by replacing the entire column. As such, the scanning electron microscope has the advantage of being simply and easily repaired and maintained.

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Inventors:

LEE JUN HEE (KR)

Application Number:

PCT/KR2020/002488

Publication Date:

October 01, 2020

Filing Date:

February 27, 2020

Export Citation:

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Assignee:

COXEM CO LTD (KR)

International Classes:

H01J37/20

Attorney, Agent or Firm:

CHA, Hyeong-Seog (KR)

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