Title:
SCANNING ELECTRON MICROSCOPE AND METHOD FOR ANALYZING SECONDARY ELECTRON SPIN POLARIZATION
Document Type and Number:
WIPO Patent Application WO/2019/186736
Kind Code:
A1
Abstract:
This scanning electron microscope includes a spin detector for measuring the spin polarizations of secondary electrons emitted from a sample and an analysis device for analyzing the measurement data from the spin detector. The analysis device determines the width of an area in the measurement data where the secondary electron spin polarization changes locally. The analysis device additionally evaluates the strain of the sample on the basis of the width of the area. The configuration of this scanning electron microscope makes it possible to highly accurately analyze strain in a magnetic material.
Inventors:
KOHASHI TERUO (JP)
MORISHITA HIDEO (JP)
KATANE JUNICHI (JP)
MORISHITA HIDEO (JP)
KATANE JUNICHI (JP)
Application Number:
PCT/JP2018/012592
Publication Date:
October 03, 2019
Filing Date:
March 27, 2018
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N23/225; H01J37/244; H01J37/28
Foreign References:
| JP2014127224A | 2014-07-07 | |||
| JP2010003450A | 2010-01-07 | |||
| JP2010151455A | 2010-07-08 | |||
| JP2006112921A | 2006-04-27 |
Attorney, Agent or Firm:
TOU-OU PATENT FIRM (JP)
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