Title:
SCANNING ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2011/089913
Kind Code:
A1
Abstract:
Disclosed is a scanning electron microscope provided with a calculation device (403) for measuring the dimension of a pattern on a sample (413), characterized in that the amount of change of a pattern shape, caused by electron beam irradiation, is calculated and stored, and a pattern shape contour (614; 815; 1512) before the sample is irradiated with an electron beam is restored from a pattern shape contour (613; 814; 1511) in a scanning electron microscope image (612; 813; 1510) after the sample is irradiated with an electron beam using the calculated amount and, then, the pattern shape contour (614; 815; 1512) is displayed. Thus, the shrinking of a resist and/or the effect of electrostatic charge caused when a sample is irradiated with an electron beam are eliminated, so that the shape contour of a two-dimensional pattern before irradiating an electron beam can be restored with a high degree of accuracy, and the dimension of a pattern can be measured with a high degree of accuracy, using the restored image.
Inventors:
OMORI, Seiko (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
大森 聖子 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地 株式会社日立製作所 中央研究所内 Tokyo, 〒1858601, JP)
TANAKA, Junichi (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
田中 潤一 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地 株式会社日立製作所 中央研究所内 Tokyo, 〒1858601, JP)
大森 聖子 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地 株式会社日立製作所 中央研究所内 Tokyo, 〒1858601, JP)
TANAKA, Junichi (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
田中 潤一 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地 株式会社日立製作所 中央研究所内 Tokyo, 〒1858601, JP)
Application Number:
JP2011/000301
Publication Date:
July 28, 2011
Filing Date:
January 21, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishishimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
OMORI, Seiko (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
大森 聖子 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地 株式会社日立製作所 中央研究所内 Tokyo, 〒1858601, JP)
TANAKA, Junichi (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
OMORI, Seiko (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
大森 聖子 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地 株式会社日立製作所 中央研究所内 Tokyo, 〒1858601, JP)
TANAKA, Junichi (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
International Classes:
H01J37/22; G01B15/04; H01J37/28
Attorney, Agent or Firm:
INOUE, Manabu et al. (6-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 20, 〒1008220, JP)
Claims:
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