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Title:
SCANNING EXPOSURE APPARATUS, MICRO DEVICE MANUFACTURING METHOD, MASK, PROJECTION OPTICAL APPARATUS AND MASK MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2007/108420
Kind Code:
A1
Abstract:
A scanning exposure apparatus transfers and exposes the pattern of a first object (M) on a second object (P), while changing positional relationship between the scanning direction of a first projection optical system (PL2) and a second projection optical system (PL1) and the scanning direction of the first object and the second object, by using the first projection optical system arranged on the front side in the scanning direction, and the second projection optical system arranged on the rear side in the scanning direction. Each of the first projection optical system and the second projection optical system forms an expanded image, which is in the visual field on the first object, on the image field on the second object, and an inequality of Dp1) is satisfied, where, (Dm) is an interval between the center of the visual field of the first projection optical system and the center of the visual field of the second projection optical system in the scanning direction, (Dp) is an interval between the center of the image field made by the first projection optical system and the center of the image field made by the second projection optical system in the scanning direction, and (β) is a projection magnification ratio of each of the first projection optical system and the second projection optical system.

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Inventors:
KATO, Masaki (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 1008331, JP)
Application Number:
JP2007/055417
Publication Date:
September 27, 2007
Filing Date:
March 16, 2007
Export Citation:
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Assignee:
NIKON CORPORATION (2-3 Marunouchi 3-chome, Chiyoda-ku Tokyo, 31, 1008331, JP)
株式会社ニコン (〒31 東京都千代田区丸の内三丁目２番３号 Tokyo, 1008331, JP)
International Classes:
G03F7/20; G02B13/14; G02B13/24; G02B17/08; G03F1/70; G03F1/76
Attorney, Agent or Firm:
HASEGAWA, Yoshiki et al. (SOEI PATENT AND LAW FIRM, Ginza First Bldg. 10-6, Ginza 1-chom, Chuo-ku Tokyo 61, 1040061, JP)
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