Field of the invention

The device is intended for analysis of samples after modification of their surface. It can be used in medicine for analysis of biological samples, in the chemical industry, for analysis of polymers and also in various areas of the industry for analysis of nanodispersed suspensions in liquids.

Prior art

A scanning probe microscope combined with a device of modification of a surface of an object is known from Russian Patent application No. 2008130494 of 24 July 2007. This assembly includes a basic element on which are installed a holder of a puncheon with a puncheon, associated with a first drive, a holder of a sample with a sample installed on the piezo-scanner, associated with a second drive by means of a lever, and an analyzer having an opportunity of association with a sample.

The basic shortcoming of this assembly consists in installation of the sample with the holder of the sample and the piezoelectric scanner on the lever having a limited rigidity. In result there is insufficient accuracy of the analysis of a sample especially if it has big sizes and accordingly weight.

Summary of the invention

The technical result of the invention consists in increase in accuracy of measurement and expansion of functionalities.

The specified technical result is obtained as follows: a scanning probe microscope with nanotome including a basic element with a holder of a puncheon with a puncheon, associated with a first drive, with a holder of a sample with a sample installed on a piezo-scanner, associated with a second drive by means of a lever, and with a scanning probe unit having an opportunity of association with the sample, has the first drive moving the puncheon on the direction aside a sample and made in one-coordinate type (coordinate Y) and has a second drive moving the holder of a sample with a sample perpendicularly to coordinate Y and made as well in one-coordinate type (coordinate X).

There is a variant in which the drive of the holder of a puncheon is integrated with the device.

There are also variants in which the puncheon is made as a knife with a cutting edge, or as a needle which axis is installed at an angle to coordinate Y, or as a bent needle which working part is installed at an angle to coordinate Y, or the puncheon has a spherical edge.

There are also variants in which the knife has hollows or lugs on the cutting edge.

There are also variants in which the scanning probe unit, the holder of a puncheon with a puncheon and the holder of a sample with a sample are placed in a hermetic chamber or in a vacuum chamber.

There are also variants in which the holder of a puncheon and the holder of a sample are connected respectively to a first cryo-element and to a second cryo-element. Thus the first cryo-element is made as first Peltier element and the second cryo-element is made as second Peltier element, or the first cryo-element is made as first Peltier element with a heat exchanger and the second cryo-element is made as second Peltier element with a heat exchanger.

There is also a variant in which the holder of a puncheon is connected to a first cooling vessel; and the holder of a sample is connected to a second cooling vessel. Thus both cooling vessels are connected to cryogenic input.

There is also a variant in which the scanning probe unit, the holder of a puncheon with a puncheon and the holder of a sample with a sample are placed in a cryo-chamber.

There is also a variant in which the first drive is made as a mobile carriage connected to an engine of linear moving.

There is also a variant in which the second drive is made as a piezoengine.

There is also a variant in which the scanning probe unit contains piezo-scanner with a probe associated with a step-by-step engine of linear moving and installed in movable mode on coordinate X on a base element.

There are also variants with the drive, integrated in the device, of the holder of the puncheon made as a linear one-coordinate drive or as a drive of rotation and the puncheon is coated with a wear-resistant and antifriction coating.

Brief description of the figures

The simplified basic kind of a scanning probe microscope with nanotome and a puncheon as a knife is schematically represented in Fig. 1.

The variant of a puncheon as a needle is schematically represented in Fig. 2.

The variant of a puncheon as a bent needle is schematically represented in Fig. 3.

The variant of a puncheon with a spherical edge is schematically represented in Fig. 4.

The fifth variant of a puncheon with hollows on the cutting edge is schematically represented in Fig. 5. The variant of a knife with lugs on the cutting edge is schematically represented in Fig.

6.

The simplified kind of the device located in a hermetic chamber is schematically represented in Fig. 7.

The variant of cooling of a puncheon and a sample by Peltier elements is schematically represented in Fig. 8.

The simplified kind of device located in a vacuum chamber is schematically represented in Fig. 9.

The variant of cryogenic input is schematically represented in Fig. 10.

The variant of adjustable cooling of a puncheon and a sample is schematically represented in Fig. 11.

The simplified kind of device located in a cryogenic chamber is schematically represented in Fig. 12.

The general diagram of the device and variants of drives are schematically represented in Fig. 13.

The side view (C) of a drive of a sample and a scanning probe unit are schematically represented in Fig. 14.

The side view (D) of the carriage is schematically represented in Fig. 15.

The linear one-coordinate drive is schematically represented in Fig. 16.

The drive of rotation is schematically represented in Fig. 17.

The block-diagram of the control block is represented in Fig. 18.

Detailed description of the invention

A scanning probe microscope with nanotome (ultramicrotome) includes a base element 1 (a flat platform in the first variant) on which is installed a holder of a puncheon 2 with a puncheon 3, associated with the first one-coordinate engine 4. The holder of the puncheon 2 is supplied with a drive of the holder of a puncheon 5. These elements create the module of modification 6.

A holder of a sample 7 with a sample 8, associated with the second one-coordinate drive 9, is also placed on the base element 1. The sample 8 can be fixed in the holder of the sample 7 by a glue line 10. Epoxide resin can be used as glue. The side of a sample 8 which is opposed to the glue line 10 forms a surface 11 intended for modification and the analysis. Elements 7, 8, 9, 10 and 11 represent the module of a sample 12. The first drive 4 can move the puncheon 2 on coordinate Y in the direction aside the sample 8.

In particular case, moving of the puncheon 3 can be in parallel to the surface 11 if the surface 11 of the sample 8 represents a plane. Generally the primary surface 11 can be convex, concave, with lugs, etc before its modification.

A knife with an extended rectilinear cutting edge 13 (the first variant) is most frequently used as the puncheon 3. In this case the surface 11 of the sample 8 will be a plane after the first cut and each consecutive moving of the puncheon 3 (knife) will be in parallel to this plane. We shall accept this plane as the surface 11 for this case.

The second drive 9 can move the sample 8 on coordinate X which is perpendicular to coordinate Y. The scanning probe unit 14 is also placed on the base element 1. This unit has an opportunity of interact with sample 8 and, in particular, with its surface 11. Modules 6, 12 and 14 are connected to the control block 15 which can be manufactured as the module of the central processor constructed, for example, on the basis of digital alarm processor (DAP) and containing the controller of the block 14, the controller of the first one-coordinate drive 4, a drive of the holder of the puncheon 5 and the controller of the second one-coordinate drive 9. The module of the central processor can include an analog-to-digital converter (ADC) and a set of interfaces for communication with other devices included in the controller and also with a managing computer.

In the second variant the puncheon 3 can be made as a needle 16 (Fig.2) with an edge 17. It is fixed in the holder of the needle 18 with a screw 19 at an angle a to direction Y. Preferable value of angle a can be in a range of 30-45 degrees.

In the third variant the puncheon 3 can be made as a bent needle 20 (Fig.3) with an edge 21. It can be directed with a working part 22 at an angle β to direction Y and it is fixed in the holder 23. Preferable value of angle β can be in the range 45-90 degrees. Fixation of the needle 20 in the holder 23 is not shown in a binding manner. It can be a screw or glue, for example, epoxy glue. The needles 16 and 20 can be made from tungsten, platinum or platinum- iridium wires with diameters in the range of 0.1 -lmm. They can be sharpened by an electrochemical method (for details see in Russian patent No. 2358239 of 10 June 2009).

In the fourth variant the puncheon 24 (Fig. 4) can have a spherical edge 25. Thus integration of the puncheon 24 with the holder 26 can be carried out, for example, by means of a threaded coupling 27.

In the fifth variant the puncheon 3 can be made as a knife 28 (Fig. 5) with hollows 30 on a cutting edge 29. The hollows 30, for example, can have the cylindrical form and depth in the range 10-100 μιη. The hollows 30 also can be triangular, rectangular and oval (it is not shown).

In the sixth variant a knife 31 has a cutting edge 32 with lugs 33, for example, of the triangular form in height B in the range 10-100 μιη. Their form also can be cylindrical, rectangular or oval (it is not shown).

In the second variant the base element 1 (Fig. 1) represents a hermetic chamber 34 (Fig. 7), formed as a case 35 with a bottom 36, a first wall 37 and a second wall 38 (walls which are perpendicular to them are not marked). A transparent cover 40 can be installed on the case 35 by means of a first rubber cup 39. The case 35 can be made of stainless steel and the cover 40 can be made from organic glass. Elements of fastening of the cover 40 to the case 35 are not shown in a binding manner. They can be screws, bolts or staples.

An entrance branch pipe 41 connected to a source of cleaned dry nitrogen, argon or other inert gas 42 with a valve 43 can be installed on the first wall 37. An outlet branch pipe 44 with a valve 45 can be installed on the second wall 38. The module of modification 6, the module of the sample 12 and the unit 14 are located inside the hermetic chamber 34. Thus the module of modification 6 can be connected to a first cryo-element 46 and the module of the sample 12 can be connected to a second cryo-element 47. The cryo-elements 46 and 47 are connected to a first control module 48.

In the first variant every cryo-element can represent a Peltier element. In the second variant it can represent a Peltier element with a heat exchanger. The first Peltier element 49 (Fig. 8) is connected to the first heat exchanger 50. The heat exchanger can be made, for example, as a coil (it is shown conditionally). It is connected to a source of cold water 53 with inlet 51 and outlet 52 pipelines. The first Peltier element 49 is connected to a second control module 54. The first thermocouple 55 installed in the first isolator 56 in the holder 2 and connected with the puncheon 3 can be also connected to it.

The maximal thermal contact between Peltier element 49 and the holder of the puncheon 2 is provided with high clean processing (height of microroughness less than 1 μιη) of the surface of the holder 2 which is contacted with Peltier element 49. Pressing of first Peltier element 49 to the holder 2 and also to the heat exchanger 50 can be carried out by screws and staples (it is not shown).

The second Peltier element 57 can be similarly connected to the holder of the sample 7 and the heat exchanger 50 and can have the third control module 58 with the second thermocouple 59 installed in the second isolator 60 in immediate proximity to the sample 8. The same heat exchanger 50 can be connected to a source of cold water 53 by the same inlet 51 and outlet 52 pipelines.

The variant is also possible in which the control modules 54 and 58 are combined into one control module 48 (as in Fig. 7). Control modules of Peltier elements can be made as automatically adjustable sources of current with a digital feedback. They can contain an ADC module connected to thermocouples 55 and 59, which are integrated to the module of the digital alarm processor and to the module of digital- analog converter (DAC) connected to Peltier elements 49 and 57.

In the third variant the base element 1 is made as a vacuum chamber 61 (Fig. 9) formed as a case 62 connected with a transparent cover 64 by means of a second rubber cup 63. Fastening of the cover 64 to the case 62 is not shown conditionally. The material of the case 62 can be stainless steel, and material of the cover 64 can be glass. Pumping out means 65 are connected to the case 62. A turbomolecular pump with means of measurement of vacuum can be used as pumping out means (it is shown conditionally).

The module of modification 6 and the module of the sample 12 are installed inside the case 62. They are connected with a cryogenic input 68 connected to a source of coolant 69 (it is shown conditionally) by cooling vessels 66 and 67. The cooling vessels 66 and 67 can be made from harnesses consisting of thin (0.1 - 0.2 mm) copper wires with an overall section of about 2.5 mm · 2.5 mm. The module of maintenance of temperature 70 (it is shown conditionally) is used for adjustment of temperature of the modules 6 and 12. Cryogenic input 68 (Fig. 10) can represent a hollow container filled with copper balls and connected by the inlet pipeline 71 and the outlet pipeline 72 with a source of coolant 73 (see also 69, Fig. 9 where it is shown conditionally). It can contain a system of pumping, assembly and storage of coolant (liquid nitrogen).

The pipelines 71 and 72 are connected to the case 62 by means of heat interchanges representing thin-walled rustproof tubes 74 welded to the case 62 with one end and to the pipelines 71 and 72 with the other end by means of flanges 75. Some thin- walled tubes and some flanges can be used for each pipeline for improvement of heat interchange (for details of cryogenic input see in Russian patent No. 2254622 of 20 June 2005). The module of maintenance of temperature 70 (Fig. 9 where it is shown conditionally) contains the first heater 76 (Fig. 11) connected, for example, by means of screws (are not shown) to the holder of the puncheon 2 including the first thermocouple 55 (as well as on Fig. 8) installed in immediate proximity of the puncheon 3 by means of the first isolator 56.

The second heater 77 is fixed on the holder of the sample 7 and the second thermocouple 59 is located in immediate proximity of the sample 8 by means of the second isolator 60. Heaters 76, 77 (nichrome spirals in isolator) and thermocouples 55 and 59 are connected to the fourth control module 78. This module can be made as a module of automatically adjustable sources of current with a digital feedback. They can contain an ADC module connected with the thermocouples 55 and 59 which are connected to the module of the digital alarm processor and to the module of digital-analog converters (DAC) connected to heaters 76 and 77. The harnesses 66 and 67 (Fig. 9) are not shown in Fig. 11.

In one of variants the module of modification 6 (Fig. 12), the module of the sample 12 and the unit 14 can be located in a standard cryogenic chamber 80 (it is shown conditionally) with a module of maintenance of temperature and of control 81. The cryogenic chamber 80 is formed as a case 82 with a transparent cover 83 which can be unhermetically installed on it for an opportunity of evaporation of a coolant. The module 81 can contain a supercharger of nitrogen and a measuring instrument of temperature (are not shown). For details of cryogenic chamber 80 see "Leica Ultracut EM FC6 - brochure, Leica Mikrosysteme GmbH, Vienna Austria, 2005".

The scanning probe unit 14 is used in the hermetic chamber 34 (Fig. 7), in the vacuum chamber 61 (Fig. 9) and in the cryogenic chamber 80 (Fig. 12). The scanning probe unit 14 contains a piezo-scanner 85 (Fig. 13, Fig. 14) with a holder of a probe 86 and a probe 87 representing a quartz resonator 88 with edge 89. The piezo-scanner 85 is fixed on a platform 90 and is placed on a basis 91 by means of guides which can represent a flat plate 92 and a first V-shaped element 93. A ball 94 is fixed at one edge of the platform 90 and placed on the flat plate 92. Balls 95 are fixed at the other edge of the platform 90 and placed on the first V- shaped element 93. The balls 95 can have a diameter greater than the ball 94 for convenience of installation on the V-shaped element 93.

The platform 90 is integrated with a step-by-step engine 96, for example, with a reducer which converts rotary movement into linear movement (see, for example, Motorized Stages and Controllers Catalog, Standa Ltd., Vilnius, Lithuania, 2009 (www.standa.lt/PDF/motorized_stages_controllers.pdf)). This integration can be carried out by means of a coupling 97 located with an opportunity of interaction with a pusher 98 which can move the platform 90 to the different sides on coordinate X. Clearances between the coupling 97 and the pusher 98 are necessary for ability of the pusher 98 to leave in the clearance and not to prevent measurements of the surface 11 after moving the probe 87 to the sample 8 up to a zone of the beginning of interaction between the edge 89 and the surface 11.

The described scanning probe unit in aggregate with the sample 8 represents the scanning probe microscope (SPM), i.e. specifically the atomic-force microscope described also in Russian patent No. 2233490 of 27 July 2004. It is necessary to notice that it is possible to use a scanning tunnel microscope (STM, it is not shown) in stead of the SPM.

The holder of the sample 7 can be integrated with the second drive 9 (Fig. 1), in this case it is possible to use a piezo-engine 99 (Fig. 13, Fig. 14) fixed on a prop 100. The basis 91 and the prop 100 are placed on the base element 1. It is possible to use an inertial not resonant one-coordinate piezo-engine (K.Spanner, O. Vyshnevskyy, W. Wischnewskiy, "New Linear Ultrasonic Motor for Precision Mechatronics Systems", Physik Instrumente GmbH & Co. KG, Karlsruhe, Germany, 2006 (www.pi.ws)) or a set of flat piezo-elements as the piezo- engine 99.

The first drive 4 (Fig. 1) can contain an engine of linear moving (for example, a step-by-step engine with a reducer) 101 (Fig. 13) with a pusher 102 integrated with a mobile carriage 103 (see also Fig. 15) which is placed on a second V-shaped element 104. The engine 101 can be the same as the engine 96. They can differ only by pushers. The holder of the puncheon 2 with the puncheon 3 is fixed on the mobile carriage 103. The carriage 103 is tightened to the second V-shaped element 104 by a clamp 105 with a frictional insert 106. The clamp 105 can be made from spring bronze with a thickness 0.2 mm and width 10 mm and it is fixed on the second V-shaped element 104 by screws (it is not shown). The frictional insert 106 can be made of fluoroplastic; the second V-shaped element 104 is made of brass, and the carriage 103 is made of steel. The first V-shaped element 93 can be shaped like the second V-shaped element 104, but it has a smaller sizes of the V-shaped hollow. Springs 107 placed on the base element 1 by means of racks 108 and integrated with the carriage 103 by rods 109 are used for return movement of the puncheon 3 from the sample 8.

A linear one-coordinate drive 110 (see, for example www.attocube.com) or a set of flat piezo-elements fixed in a hollow 111 of the carriage 103 can be used as a drive of the holder of the puncheon 5 (Fig. 16). In another variant (Fig. 17) a drive of rotation 112 (see also [9]) fixed on the carriage 103 can be used as the drive 5. A wear-resistant antifriction coating 113 made of perfluoropolyoxaalkylenecarbon acids can be deposited on the puncheon 3. This coating will be most frequently deposited on a knife manufactured from diamond. The coating 113 forms a solid monolayer with a thickness 2-7 nm. In case of presence of defects on the surface of diamond the coating can have breaks of the solid layer with sizes 0.1-10 microns. For details on deposition of a coating see in N.A.Ryabinin and others "Durability, resource- saving due to application of epilam structures" Industry No. 1 (3). S-Petersburg, 2004 and "New in technologies of fluorine bonds" Transl. from Japan, under the reduction of I.Isycava, 1984. 592 p.

The piezo-scanner 85 with the probe 87, the first step-by-step engine 96, the drive 5, the piezo-engine 99 and the second step-by- step engine 101 are connected to the control block 15. The control block 15 can contain a module of a central processor 120 (Fig 18) constructed, for example, of 32 digit DAC and integrated with a module of a digital synchronous detector 121 connected to the first probe 87 by a three-channel unit of digital-to- analog converters (DAC) 122, by a controller 124 of step-by-step engines 96 and 101 and by a controller 125 of the piezo-module 99 and the drive 5. The three-channel unit DAC 122 is in turn connected to a three-channel unit of high- voltage amplifiers 123 connected with the piezo-scanner 85. ADC and a set of interfaces for communication with other devices included in the controller and also with a managing computer 126 can be included in the structure of the module of the central processor 120.

The module of the digital synchronous detector 121 can be made with application of high-speed ADC/DAC and with the programmed logic integrated circuit. The module can contain a precision amplifier of a signal and a highly stable generator of the stimulating signal connected to the first probe 87.

The controller of step-by- step engines 124 can be made with support of a microstep-by-step mode and with an opportunity of connection of limit sensors for each engine (are not shown).

The device works as follows. The puncheon 3 (Fig. 1) is fixed in the holder 2. The sample 8 is fixed in the holder 7. After realization of a cut of the sample 8 the analysis of smooth surface 11 is carried out by the scanning probe unit 14 if a knife is used as the puncheon 3. The cut of the sample 8 occurs due to moving of the puncheon 3 on coordinate Y. This moving is carried out through interaction of the pusher 102 (Fig. 13) with the carriage 103 which linearly moves on a V-shaped element 104 aside the sample 8. Back moving of the puncheon 3 occurs due to springs 107.

Placement of the probe 87 (edge 89) over the surface 11 is carried out after a cut of the sample 8 at use of an atomic-force microscope (Fig. 13, Fig. 14). For this purpose the platform 90 is moved on coordinate X aside the sample 8 by the pusher 98. After reaching the surface 11 by the edge 89 the pusher 98 moves into a spacing of the coupling 97 in order not to render mechanical influence on measurement of the surface 11.

Then raster scanning of the specified part of the surface 11 with the specified step of a raster is carried out with the help of the piezo-scanner 85. Measurement of amplitude of fluctuations of the quartz resonator 88 is carried out in each point of a raster with the module of the digital synchronous detector 121 (Fig. 18). Then the module of the central processor 120 integrated with a three-channel block DAC 122 and a three-channel block of high-voltage amplifiers 123 supplies a voltage on the piezo-scanner 85 according to the specified algorithm of a feedback. Owing to it the piezo-scanner 85 moves the probe 87 on coordinate X so that the amplitude of fluctuations of the quartz resonator 88 remains constant. Voltage supplied on the piezo-scanner 85 manages moving of the probe 87 on coordinate X and it is recalculated in each point of a raster by the module of the central processor 120 in coordinate X corresponding to the given point of the surface. That allows obtaining the three- dimensional image of topography of the analysed part of the surface 11.

Additional measurement in each point of a raster of shift of a phase of fluctuations of the quartz resonator 88 in respect to a basic signal from the highly stable generator of a stimulating signal allows obtaining the information on mechanical properties of a surface in corresponding points. Operation of AFM is also described in Roland Wiesendanger (Ed.) "Scanning probe microscopy: analytical methods", ISBN 3-540-63815 Springer- Verlag Berlin Heidelberg, 1998. Conductivity of the surface 11 is necessary for work of a scanning tunnel microscope. That does not happen frequently for the declared circle of samples.

After finish of measurement the pusher 98 (Fig. 13) removes the probe 87 from the surface 11 due to its interaction with the coupling 97. The following cut of the sample 8 and the following measurement of its surface are carried out further. Therefore it is possible to analyse samples on three coordinates. Each subsequent cut of the sample 8 occurs due to moving the sample 8 on coordinate X by means of the piezo-motor 99. Besides a cut of the surface of the sample 8 by knife it is possible to modify the surface by means of the needle 16 (Fig. 2). For this purpose the needle 16 is placed on coordinate Y in required position in respect to the sample 8. After it the piezo-motor 99 is put forward aside the needle 16 and the needle 16 is returned in a starting position pressing on the surface 11 of the sample 8. Mechanical (elastic and plastic) properties of the surface can be judged according to speed of restoration of the surface 11 of the sample 8 and residual size of the hollow. Depth of pressing of the sample 8 with the needle 16 can vary in a range from 10 up to 1000 nm.

The needle 20 (Fig. 3) can form hollows by means of locally interactions with the sample 8 or apertures in thin films. For this purpose the sample 8 is moved on coordinate X after installation of the needle 20 in required position on coordinate Y. In this case it is also possible to study regenerative abilities of materials or size of an aperture in a film depending on depth of penetration of the needle 20 in the sample 8.

Using the puncheon 24 (Fig. 4) it is possible to make a split of the sample 8, for example, gallium arsenide or silicon. After that it is possible to research a surface of the split in a vacuum chamber (Fig. 9).

Using the knife 28 (Fig. 5) it is possible to carry out a cut of the sample 8 and simultaneously to leave a part of the surface of the sample 8 to be not cut off in the event that thickness of a cut will be less than depths A of hollows 30. In this case it is possible to carry out comparative analyses of cut off and not cut off surfaces.

Using the knife 31 (Fig. 6) simultaneously with a cut of the surface of the sample 8 it is possible to form hollows on it by means of lugs 33. The hollows can serve as reference points for subsequent measurements.

It is possible to cool the sample 8 and to cut it off in frozen condition at measurements in the tight chamber (Fig. 7). Peltier elements 49 and 57 can cool the knife 3 and the sample 8 down to temperature -60 °C. In the frozen condition it is expedient to analyse biological objects, liquids and soft polymeric and elastomeric materials. The required temperature is supported with modules 54 and 58.

Dry nitrogen or other inert gas protects a measured surface from formation of water ice on it.

Measurements in the vacuum chamber (Fig. 9) are basically interesting for analysis of semiconductors, for example, silicon or arsenide of gallium after their split. In this case it is expedient to carry out low temperature analyses with use of the cryogenic input 68 which is applied for cooling the puncheon 3 and the sample 8 by means of harnesses 66 and 67. The sample can be cooled down to temperature about -120 °C using liquid nitrogen as a cooling agent. Temperature of the sample 8 is adjusted by heaters 76 and 77 which are controlled by the module 78.

Using the cryo-chamber (Fig. 12) the degree of cooling of the sample 8 is determined by its opportunities.

Use of the drive 5 allows affecting the probe 89 for its modification. After a nonfunctional bend of the probe 89 it can be unbent by the knife 3 in the starting position, using, for example, the drive 112. The firm edge of the probe 89 is not always grown blunt at its nonfunctional interaction with the "soft" surface 11. Using the drive of rotation 112 (Figs. 17) as the drive 5 it is possible to control quality of the antifriction coating 113 deposited on the plane 115 up to the edge 114. For this purpose the drive 112 should position the plane 115 perpendicularly to coordinate X. It improves quality of a cut.

Rigidity of the device, quality of a cut and accordingly accuracy of measurement are increased thanks to making the first drive as one-coordinate drive (coordinate Y) with its ability to move the puncheon 3 on the direction aside the sample 8 and also the second drive as one-coordinate drive (coordinate X) with its ability to move the holder of the sample 7 with the sample 8 perpendicularly to coordinate Y. High rigidity of the device allows using samples of greater size and weights that expands its functionalities.

Fastening the block 14 on the base element 1 and its integration with the sample 8 by means of the base element 1 increases accuracy of measurement due to rigidity of system.

Manufacturing the punch 3 as a knife with a cutting edge 13, or as the needle 16 which axis is at an angle to coordinate Y, or as the bent needle 20 which working part is at an angle to coordinate Y, or with a spherical edge 25 expands functionalities of the device thanks to use of various ways of influence on the sample 8.

The knife which has hollows 30 on a cutting edge expands functionalities of the device thanks to comparative analysis of the different surfaces which were cut off and were not cut off. Reference points on the cut off surface of the sample 8 as hollows produced from lugs 33 can be applied for selection of zones of measurement. These reference points can be used for subsequent cuts by the knife 3 with an extended cutting edge. It can take place if thickness of subsequent cuts is less than depth of hollows. Thus it is possible to compare an amount of, for example, certain fragments on the zones selected by hollows.

There are variants in which the block 14, the holder of the puncheon 2 with the puncheon 3 and the holder of the sample 7 with the sample 8 are placed in the hermetic chamber 34, or in the vacuum chamber 61. It increases accuracy of measurement thanks to less presence of acoustic and electromagnetic interferences in chambers. It also expands functionalities of the device thanks to increase in types of measured objects.

There are variants in which the holder of the puncheon 2 and the holder of the object 7 are connected accordingly to the first cryo-element 46 and to the second cryo- element 47, thus the first cryo-element 46 is made as the first Peltier element 49 and the second cryo-element 47 is made as the second Peltier element 57 or the first cryo-element 46 is made as the first Peltier element 49 with the heat exchanger 50 and the second cryo-element 47 is made as the second Peltier element 57 with the heat exchanger 50.

There is also the variant in which the holder of the puncheon 2 is connected to the first cooling vessel 66 and the holder of the object 7 is connected to the second cooling vessel 67, thus both cooling vessels are connected to cryogenic input 68, or there is the variant in which the block 14, the holder of the puncheon 2 with the puncheon 3 and the holder of the sample 7 with the sample 8 are placed in the cryo-chamber. All these variants expand functionalities of the device thanks to increase in types of measured objects.

There is the variant in which the first one-coordinate drive 4 is made as a mobile carriage 103 integrated with the engine of linear moving 101. It allows moving the puncheon 3 precisely in respect to the sample 8 that increases quality of influence on it and accordingly accuracy of measurement.

There is the variant in which the second one-coordinate drive 9 is made as piezo- drive 99. Accuracy of moving of the sample 8 and accordingly accuracy of measurement at joining of consecutive cuts of the sample 8 is increased in this case.