Title:
SCANNING PROBE MICROSCOPY SYSTEM FOR AND METHOD OF MAPPING NANOSTRUCTURES ON THE SURFACE OF A SAMPLE
Document Type and Number:
WIPO Patent Application WO/2018/212645
Kind Code:
A8
Abstract:
The present document relates to a scanning probe microscopy system and method for mapping nanostructures on the surface of a sample. The system comprises a sample support structure, a scan head including a probe comprising a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system also includes an optical source, and a sensor unit for obtaining a sensor signal indicative of a position of the probe tip. The sensor unit includes a partially reflecting element for reflecting a reference fraction and for transmitting a sensing fraction of the optical signal. It further includes directional optics for directing the sensing fraction as an optical beam towards the probe tip, and for receiving a reflected fraction thereof to provide a sensed signal. Moreover the sensor includes an interferometer for providing one or more output signals, and signal conveyance optics for conveying the sensed signal and the reference signal to the interferometer. The directional optics is configured for directing the sensing fraction such that at least a part of the sensing fraction is reflected by the probe tip such as to form the reflected fraction.
Inventors:
SADEGHIAN MARNANI HAMED (NL)
KASTELIJN AUKJE (NL)
TOET PETER MARTIJN (NL)
KRAMER GEERTEN FRANS IJSBRAND (NL)
NIEUWKOOP EVERT (NL)
DEKKER ALBERT (NL)
VAN RIEL MARTINUS CORNELIUS JOHANNES MARIA (NL)
KRUIDHOF RIK (NL)
KASTELIJN AUKJE (NL)
TOET PETER MARTIJN (NL)
KRAMER GEERTEN FRANS IJSBRAND (NL)
NIEUWKOOP EVERT (NL)
DEKKER ALBERT (NL)
VAN RIEL MARTINUS CORNELIUS JOHANNES MARIA (NL)
KRUIDHOF RIK (NL)
Application Number:
PCT/NL2018/050316
Publication Date:
December 20, 2018
Filing Date:
May 14, 2018
Export Citation:
Assignee:
TNO (NL)
International Classes:
G01Q20/02; G01B9/02
Attorney, Agent or Firm:
JANSEN, C. M. (NL)
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