Title:
SCANNING TRANSMISSION ELECTRON MICROSCOPE AND AXIAL ADJUSTMENT METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2012/014665
Kind Code:
A1
Abstract:
Disclosed is a scanning transmission electron microscope in which an aberration corrector is mounted and in which positional alignment of the convergence aperture onto the centre of the optical axis can be performed automatically irrespective of the experience or skill of the operator. A scanning transmission electron microscope comprising: an electron source; a converging lens that converges an electron beam emitted from the electron source; a deflector that scans the electron beam over a sample; an aberration corrector that corrects aberration of the electron beam; a convergence aperture that determines the angle of convergence of the electron beam; and a detector that detects electrons transmitted or diffracted through the sample, wherein contrast information of a Ronchigram formed by the electron beam that is passed through the sample is acquired, and the position of the convergence aperture is determined on the basis of this information.
Inventors:
NAKAMURA Kuniyasu (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
中村 邦康 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
中村 邦康 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
Application Number:
JP2011/065790
Publication Date:
February 02, 2012
Filing Date:
July 11, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
NAKAMURA Kuniyasu (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
NAKAMURA Kuniyasu (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
International Classes:
H01J37/04; H01J37/09; H01J37/28
Attorney, Agent or Firm:
HIRAKI Yusuke (Kamiya-cho MT Bldg. 19F, 3-20 Toranomon 4-chome, Minato-k, Tokyo 01, 〒1050001, JP)
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Claims:
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