Title:
SCANNING TRANSMISSION TYPE ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2012/005056
Kind Code:
A1
Abstract:
Disclosed is a scanning transmission type electron microscope provided with: an aberration corrector (805) for correcting the aberration of an electron optical system that irradiates electron beams to a sample (808); detectors (813, 814) for detecting electron beams that have transmitted through the sample; and an information processing apparatus (703) for processing signals detected by the detectors. The information processing apparatus divides a Ronchigram obtained by the detector into a plurality of areas, and calculates a feature vector (W; 903), which reflects the magnitude and direction of an on-axis secondary coma aberration (B2), from the values of an off-axis defocus (C1 (τ)) to be obtained for each of the plurality of areas, and the distance (τ) from the center of the Ronchigram to the center of the plurality of areas, and also calculates the correcting condition for the on-axis secondary coma aberration with the feature vector. In such a way, a scanning transmission type electron microscope that can correct the on-axis secondary coma aberration thereof in a short period of time, and efficiently, was able to be provided.
Inventors:
AKIMA Hisanao (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
秋間 学尚 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地 株式会社日立製作所 中央研究所内 Tokyo, 〒1858601, JP)
秋間 学尚 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地 株式会社日立製作所 中央研究所内 Tokyo, 〒1858601, JP)
Application Number:
JP2011/061232
Publication Date:
January 12, 2012
Filing Date:
May 16, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
AKIMA Hisanao (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
AKIMA Hisanao (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
International Classes:
H01J37/153; H01J37/22; H01J37/24; H01J37/28
Attorney, Agent or Firm:
POLAIRE I.P.C. (7-1 Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)
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Claims: